From gsosa at snf.stanford.edu Mon Jan 5 15:59:57 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Jan 2009 15:59:57 -0800 Subject: Comment karlsuss SNF 2009-01-05 15:59:56: Startup 01/05/09 Message-ID: Powered up lamp and system. Checked and adjusted lamp position. Checked and calibrated lamp power supply. Intensisty set to 15.0 Mw/cm2, Uniformity 2.3% From mahnaz at snf.stanford.edu Mon Jan 5 22:03:48 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Jan 2009 22:03:48 -0800 Subject: Comment karlsuss SNF 2009-01-05 22:03:48: update Message-ID: The system got the pm on 12/18 and 1/19 of 2008 I tested the system on 12/19. I ran two wafers simultaneously for each thickness and ran it with both developers. 1 um of 3612: 1.1 second of exposer in Hard contact regular developer Ldd26W vs. MF26A I resolved 1um ( some area) and 1.5 um line and space in all areas, with both developers. For 1 um depending on your polarity of your mask and etc. you need 1.1 to 1.3 seconds of exposer. Please note that the original recipe already has been replaced with new developer and the recipe on both svgdev and svgdev2 has been modified for 1 um resist. Same was done with 1.6 um 3612 , 1.6 seconds of expose in Vac. contact and 1.5 um line and space was resolved in all areas with both developers. Please note that the original recipe already has been replaced with new developer and the recipe on both svgdev and svgdev2 has been modified for 1.6 um resist. depending on your polarity of your mask for 1.6 um resist you need 1.5 to 1.8 seconds of exposer. From dalyx at snf.stanford.edu Wed Jan 7 15:44:54 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Wed, 7 Jan 2009 15:44:54 -0800 Subject: Comment karlsuss SNF 2009-01-07 15:44:54: WEC pressure <0.1 Message-ID: From yeh at snf.stanford.edu Thu Jan 8 10:43:21 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 8 Jan 2009 10:43:21 -0800 Subject: Comment karlsuss SNF 2009-01-08 10:43:20: courtesy Message-ID: found exp. time at 190sec. took a few minutes to return it to 1sec. (exp time can only be changed by up/down arrow keys-slow). pls change time back to normal range after use. thx. From tdo at stanford.edu Thu Jan 8 10:50:57 2009 From: tdo at stanford.edu (Thomas O'Sullivan) Date: Thu, 08 Jan 2009 10:50:57 -0800 Subject: Comment karlsuss SNF 2009-01-08 10:43:20: courtesy In-Reply-To: <20090108184321.9F9D53B6F74@smtp5.stanford.edu> References: <20090108184321.9F9D53B6F74@smtp5.stanford.edu> Message-ID: <49664B11.9070805@stanford.edu> To whoever who is trying 190sec exposure: it would probably be more convenient to use the multiple exposure setting (19 x 10 sec, or similar). Best, Tom yeh at snf.stanford.edu wrote: > found exp. time at 190sec. took a few minutes to return it to 1sec. (exp time can only be changed by up/down arrow keys-slow). pls change time back to normal range after use. thx. > > From vilanova at stanford.edu Thu Jan 8 11:01:29 2009 From: vilanova at stanford.edu (Vilanova) Date: Thu, 08 Jan 2009 11:01:29 -0800 Subject: Comment karlsuss SNF 2009-01-08 10:43:20: courtesy In-Reply-To: <49664B11.9070805@stanford.edu> References: <20090108184321.9F9D53B6F74@smtp5.stanford.edu> <49664B11.9070805@stanford.edu> Message-ID: <49664D89.40407@stanford.edu> Thomas O'Sullivan wrote: > To whoever who is trying 190sec exposure: it would probably be more > convenient to use the multiple exposure setting (19 x 10 sec, or > similar). > > Best, > Tom > > yeh at snf.stanford.edu wrote: > >> found exp. time at 190sec. took a few minutes to return it to 1sec. >> (exp time can only be changed by up/down arrow keys-slow). pls >> change time back to normal range after use. thx. >> >> > IF YOU PRESSED THE ARROW KEY ALONG WITH THE BUTTON / KEY THAT READS "FAST" THAT WILL TAKE YOU FASTER TO THE EXPOSURE TIME THAT YOU WANT. Mario V. From shott at snf.stanford.edu Tue Jan 20 07:34:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:27 -0800 Subject: Comment karlsuss SNF 2007-11-16 12:47:24: Replaced illumination lamp Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:34:34 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:34 -0800 Subject: Comment karlsuss SNF 2008-01-24 10:02:42: Exposure ok Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:34:39 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:39 -0800 Subject: Comment karlsuss SNF 2008-01-24 10:28:45: Addition: above jparker message Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:34:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:45 -0800 Subject: Comment karlsuss SNF 2008-01-24 15:24:50: Alignment OK Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:34:51 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:51 -0800 Subject: Comment karlsuss SNF 2008-02-12 15:54:40: works great Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:34:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:34:57 -0800 Subject: Comment karlsuss SNF 2008-03-25 08:43:05: TOp Left Side objective motor broken Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:14 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:14 -0800 Subject: Comment karlsuss SNF 2008-03-27 12:52:37: Tool Update 3/27 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:20 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:20 -0800 Subject: Comment karlsuss SNF 2008-04-11 15:24:16: up date Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:25 -0800 Subject: Comment karlsuss SNF 2008-04-21 13:34:08: KS1 Quals, Week of 4/13 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:30 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:30 -0800 Subject: Comment karlsuss SNF 2008-04-25 16:31:59: KS1 Litho Quals, Week of 4/20 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:35 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:35 -0800 Subject: Comment karlsuss SNF 2008-08-18 15:42:58: Power failure recovery Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:40 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:40 -0800 Subject: Comment karlsuss SNF 2008-09-29 17:47:58: exposer Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:45 -0800 Subject: Comment karlsuss SNF 2008-11-04 07:43:26: DEEP UV MODE ON 11//11/08 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:52 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:52 -0800 Subject: Comment karlsuss SNF 2008-11-11 10:48:01: SYSTEM BACK TO NORMAL SETTINGS Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:35:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:35:57 -0800 Subject: Comment karlsuss SNF 2008-12-03 08:51:18: Lamp Replaced 12/3 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:02 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:02 -0800 Subject: Comment karlsuss SNF 2009-01-05 15:59:56: Startup 01/05/09 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:08 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:08 -0800 Subject: Comment karlsuss SNF 2009-01-07 15:44:54: WEC pressure <0.1 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:13 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:13 -0800 Subject: Comment karlsuss SNF 2009-01-05 22:03:48: update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:25 -0800 Subject: Comment karlsuss SNF 2009-01-08 10:43:20: courtesy Message-ID: To the archives ... From mkerby at snf.stanford.edu Wed Jan 28 14:12:50 2009 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Wed, 28 Jan 2009 14:12:50 -0800 Subject: Problem karlsuss SNF 2009-01-28 14:12:49: lamp life/power failure Message-ID: A failure alert. the lamp life/power light is flashing From vilanova at snf.stanford.edu Wed Jan 28 15:00:25 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Jan 2009 15:00:25 -0800 Subject: Problem karlsuss SNF 2009-01-28 14:12:49: lamp life/power failure Message-ID: recalibrbated lamp, lamp life power failure gone, ready to use