From vilanova at snf.stanford.edu Tue Mar 3 08:41:03 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Mar 2009 08:41:03 -0800 Subject: Comment karlsuss SNF 2009-03-03 08:41:02: LAMP CHANGE COMPLETED. Message-ID: LAMP CHANGED AND CALIBRATION COMPLETED. INTENSITY = 15MW/CM2 UNIFORMITY = 2% From jwpchen at snf.stanford.edu Fri Mar 6 23:31:57 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Fri, 6 Mar 2009 23:31:57 -0800 Subject: Comment karlsuss SNF 2009-03-06 23:31:56: chuck micrometer ranges limited Message-ID: x- and y-micrometer ranges are only about 2-3mm from "center" before the machine beeps and warns, I don't remember what the ranges were before, and if the goal is to prevent users from falling off the micrometer threads, but the current ranges seem quite restrictive From jwpchen at snf.stanford.edu Sun Mar 8 03:27:33 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 8 Mar 2009 03:27:33 -0700 Subject: Problem karlsuss SNF 2009-03-08 03:27:33: lost mask vacuum, now vacuum seal low + hiss Message-ID: after 'alignment check', hit 'alignment check' again to go back to adjust wafer alignment, heard a "tick", and then tool reports lost mask vacuum. Can still unload wafer, which has the mask sitting on top. Now there is a hissing sound from tool, and vacuum seal reading is low. Vacuum seal reading is normal when I started. Cannot continue using tool because operating checklist is not satisfied. From jwpchen at snf.stanford.edu Sun Mar 8 03:56:19 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 8 Mar 2009 03:56:19 -0700 Subject: Problem karlsuss SNF 2009-03-08 03:56:19: re: previous problem Message-ID: in case i gave the wrong impression, mask was adhered to the wafer when it came out (on the chuck since it's no longer held by the mask holder), but it's not stuck on hard, a gentle pry and the wafer (my precious device wafer) breaks free From gsosa at snf.stanford.edu Mon Mar 9 13:16:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Mar 2009 13:16:43 -0700 Subject: Problem karlsuss SNF 2009-03-08 03:27:33: lost mask vacuum, now vacuum seal low + hiss Message-ID: Cleaned maskholder and tested system operation. All looks OK. From gsosa at snf.stanford.edu Mon Mar 9 13:27:16 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Mar 2009 13:27:16 -0700 Subject: Comment karlsuss SNF 2009-03-06 23:31:56: chuck micrometer ranges limited Message-ID: The X and Y motion warnings do not apear under normal system operation. These warnings appear during a system power up. X and Y out of range errors occor whan the stages are not at or close to the center of travel position during a power up/initialize sequence. The recovery for this is to turn the micrometers to the center position (10mm) and turn the theta so the 2 hashmarks are lined up. The display will go from "out of range" to "In range" and the display will prompt for next step. Tested stage travel limits undur normal operating conditions for both aligners ( X travel = 20 mm, Y travel = 12 mm). Tested system operation- All OK. Checked and calibrated lamp power supply. From gsosa at snf.stanford.edu Mon Mar 9 13:28:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Mar 2009 13:28:05 -0700 Subject: Problem karlsuss SNF 2009-03-08 03:56:19: re: previous problem Message-ID: Cleaned maskholder and tested system operation. All looks OK. From khoang at snf.stanford.edu Wed Mar 25 21:51:55 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Wed, 25 Mar 2009 21:51:55 -0700 Subject: Problem karlsuss SNF 2009-03-25 21:51:54: image on the screen Message-ID: the image on the screen is tilted at an angle (toward the right) From gsosa at snf.stanford.edu Thu Mar 26 16:30:48 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Mar 2009 16:30:48 -0700 Subject: Problem karlsuss SNF 2009-03-25 21:51:54: image on the screen Message-ID: Checked with test mask. Centered microscope head in theta and aligned to test patterns on mask. Found image on the monitor to be tilted. Adjusted left and right video camera's to square up images. tested system oeration- All OK. From srikantv at snf.stanford.edu Mon Mar 30 15:18:35 2009 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 30 Mar 2009 15:18:35 -0700 Subject: Problem karlsuss SNF 2009-03-30 15:18:35: right microscope focus is not clear Message-ID: From gsosa at snf.stanford.edu Tue Mar 31 11:11:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 31 Mar 2009 11:11:47 -0700 Subject: Problem karlsuss SNF 2009-03-30 15:18:35: right microscope focus is not clear Message-ID: Checked and tightened up right side video camera. Checked and adjusted microscope tilt so that objectives are square to mask plane. Focus looks much better now, Please report if focus is still not clear.