Problem karlsuss SNF 2009-03-08 03:27:33: lost mask vacuum, now vacuum seal low + hiss

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Sun Mar 8 03:27:33 PDT 2009


after 'alignment check', hit 'alignment check' again to go back to adjust wafer alignment, heard a "tick", and then tool reports lost mask vacuum. Can still unload wafer, which has the mask sitting on top. Now there is a hissing sound from tool, and vacuum seal reading is low. Vacuum seal reading is normal when I started. Cannot continue using tool because operating checklist is not satisfied.




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