Problem karlsuss SNF 2009-10-29 11:43:27:

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Thu Oct 29 11:43:27 PDT 2009


after exposing 8 wafers perfectly fine, I loaded a wafer and after doing the wec, the machine proceded to the exposure step.  I thought I had maybe accidentally hit the expose button, but it did the same thing a second time and that time I am sure nothing touched the expose button.
is there some sort of automatic mode that it may have accidentally switched over to?




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