From dpb167 at snf.stanford.edu Fri Apr 2 09:41:01 2010 From: dpb167 at snf.stanford.edu (dpb167 at snf.stanford.edu) Date: Fri, 2 Apr 2010 09:41:01 -0700 Subject: Problem karlsuss SNF 2010-04-02 09:41:00: BSA - loses "grab image" Message-ID: I did a backside alignment and had to grab an image of my mask for every wafer separately. It seemed like as I was sliding the exposed wafer out, about half way the screen would "blitz" and the grabbed image would be gone. Minor inconveinence. From vilanova at snf.stanford.edu Fri Apr 2 14:38:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Apr 2010 14:38:27 -0700 Subject: Problem karlsuss SNF 2010-04-02 09:41:00: BSA - loses "grab image" Message-ID: checked grab Image and COuldnt repeat the user problem, ok to use. From vilanova at snf.stanford.edu Tue Apr 6 08:37:03 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Apr 2010 08:37:03 -0700 Subject: Comment karlsuss SNF 2010-04-06 08:37:02: Monthly Lamp Change Completed Message-ID: I've Noticed yesterday Afternoon that the lamp was alarming while exposing this means that system is due for lamp change + calibration . Monthly Lamp Change Completed: Intensity = 15Mw/Cm2 Uniformity = 1% Also checked Bottom and Top Microscope Function. wiped out System particles, ok to use. From faridz at snf.stanford.edu Tue Apr 6 12:11:49 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 6 Apr 2010 12:11:49 -0700 Subject: Problem karlsuss SNF 2010-04-06 12:11:49: unable to focus Message-ID: unable to focus at 10x optical, contras and brightness very bad unable to align my wafers. please fix this problem becuase every one like to use Karsuss 2 aand its getting crowded. Thanks From vilanova at snf.stanford.edu Tue Apr 6 14:59:48 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Apr 2010 14:59:48 -0700 Subject: Problem karlsuss SNF 2010-04-06 12:11:49: unable to focus Message-ID: We found the Left Side Ilumination lamp almost out of the socket, I tightened and now looks Good, We still have some Issues WEC issues,Intermmitent problem while Using 10X Objective , We are aware of the problem, ( the same ones we saw back In january 2010) We'll call the Suss Service Engineer. From mahnaz at snf.stanford.edu Tue Apr 6 15:35:54 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 6 Apr 2010 15:35:54 -0700 Subject: Comment karlsuss SNF 2010-04-06 15:35:54: wec looks good Message-ID: I ran a 1 um resist and resolution looks good. I noticed loss of focus when wafer was loaded and could not focus mask and wafer. Loss of focus makes it hard for critical work. old issue, needs to be looked at. From dton at snf.stanford.edu Sun Apr 11 16:13:26 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sun, 11 Apr 2010 16:13:26 -0700 Subject: Problem karlsuss SNF 2010-04-11 16:13:25: The machine is in a hanged state. Message-ID: The firmware stuck on something. I tried to reset but couldn't. From altamash at snf.stanford.edu Sun Apr 11 19:08:19 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sun, 11 Apr 2010 19:08:19 -0700 Subject: Problem karlsuss SNF 2010-04-11 19:08:18: KS1 not working Message-ID: It starts and says load and when you press load it says z-axis range exceeded From vilanova at snf.stanford.edu Mon Apr 12 07:12:38 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 07:12:38 -0700 Subject: Problem karlsuss SNF 2010-04-11 16:13:25: The machine is in a hanged state. Message-ID: Initialized system and tested, Ok to use. From vilanova at snf.stanford.edu Mon Apr 12 07:12:57 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Apr 2010 07:12:57 -0700 Subject: Problem karlsuss SNF 2010-04-11 19:08:18: KS1 not working Message-ID: Reinitialized system , Looks Ok , ready to use. From tdo at snf.stanford.edu Wed Apr 21 14:39:36 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 21 Apr 2010 14:39:36 -0700 Subject: Problem karlsuss SNF 2010-04-21 14:39:35: cannot focus on both wafer and mask at 20x Message-ID: cannot focus on both wafer and mask at 20x with enough clarity to do a 2um alignment. tried different wafers and removing/cleaning/replacing mask. had problem with both left and right objectives. switched to karlsuss2 and it was much better From altamash at snf.stanford.edu Wed Apr 21 15:44:56 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 21 Apr 2010 15:44:56 -0700 Subject: Problem karlsuss SNF 2010-04-21 15:44:56: Focus issues Message-ID: From dalyx at snf.stanford.edu Sat Apr 24 16:56:34 2010 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sat, 24 Apr 2010 16:56:34 -0700 Subject: Shutdown karlsuss SNF 2010-04-24 16:56:34: z-axis current problem Message-ID: Software got stuck into a z-axis current problem. From gsosa at snf.stanford.edu Mon Apr 26 15:39:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Apr 2010 15:39:25 -0700 Subject: Comment karlsuss SNF 2010-04-26 15:39:24: Update 4/26 Message-ID: Z-axis overcurrent issue. Unable to initialize the system. Checked in and arount the WEC head for obstuctions. Checked and reseated all connectors in electronics rack. Reseated PC boards. Still same problem. Checked fuses on C-5, C-6, C-7 and C8 PC boards- All good. Contacted Suss Microtec to arrange a service visit. From vilanova at snf.stanford.edu Tue Apr 27 14:45:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Apr 2010 14:45:20 -0700 Subject: Shutdown karlsuss SNF 2010-04-24 16:56:34: z-axis current problem Message-ID: Z axis overcurrent problem , checked Sensors and also conecctors checked Focus Issues and so far we could not repeat the problem Please if it the p[roblem Comes back , poste it On coral, we ll keep an eye on it. Also the FSE has been called. From mahnaz at snf.stanford.edu Wed Apr 28 16:24:24 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 28 Apr 2010 16:24:24 -0700 Subject: Problem karlsuss SNF 2010-04-28 16:24:23: No Critical work Message-ID: Ran few 1 um wfs and few wfs with 1.6 um in Vaccum mode. The WEC is totally out. DO not run any Critical work please. Still trying to get KS fse to come in. From gsosa at snf.stanford.edu Fri Apr 30 10:58:28 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Apr 2010 10:58:28 -0700 Subject: Shutdown karlsuss SNF 2010-04-30 10:58:27: FSE working on tool Message-ID: FSE from Suss Microtec working on system issues From mahnaz at snf.stanford.edu Fri Apr 30 17:28:59 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 Apr 2010 17:28:59 -0700 Subject: Shutdown karlsuss SNF 2010-04-30 10:58:27: FSE working on tool Message-ID: Hello all, the ks FSE worked on the system since 11 am many adjustment was made to the WEC and every time I shot a wafer . The WEC is gotten much better for now ( especially in the center) but i have requested a a visit form them for both system. I have been told that it will be Tuesday or Wednesday of next week. The center of the wafer looks good but 15 to 20 mm around the perimeter of the wafer visibly shows the bad WEC, trust me you will see it.