Comment karlsuss SNF 2010-04-06 15:35:54: wec looks good

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Apr 6 15:35:54 PDT 2010


I ran a 1 um resist and resolution looks good.
I noticed loss of focus when wafer was loaded and could not focus mask and wafer. Loss of focus makes it hard for critical work.
old issue, needs to be looked at.




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