Problem karlsuss SNF 2010-04-11 19:08:18: KS1 not working
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Apr 12 07:12:57 PDT 2010
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Problem karlsuss SNF 2010-04-11 19:08:18: KS1 not working
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Problem karlsuss SNF 2010-04-21 14:39:35: cannot focus on both wafer and mask at 20x
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Reinitialized system , Looks Ok , ready to use.
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Problem karlsuss SNF 2010-04-11 19:08:18: KS1 not working
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Problem karlsuss SNF 2010-04-21 14:39:35: cannot focus on both wafer and mask at 20x
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