Shutdown karlsuss SNF 2010-08-26 11:35:06: keys locked

ntayebi at snf.stanford.edu ntayebi at snf.stanford.edu
Thu Aug 26 11:35:07 PDT 2010


Stage went out of range and every thing got locked even after I moved away back to front. All keys are locked and can't do anything.  Mask and piece of wafer stuck inside.




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