Problem karlsuss SNF 2010-12-08 19:26:26: machine froze

kavehm at snf.stanford.edu kavehm at snf.stanford.edu
Wed Dec 8 19:26:27 PST 2010


Machine froze when I tried exposing my third wafer. Restarted machine using on/off switch above splitfield knob. Machine stuck saying "Please Wait ..."




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