From gsosa at snf.stanford.edu  Mon Jan  4 15:24:52 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 4 Jan 2010 15:24:52 -0800
Subject: Comment karlsuss SNF 2010-01-04 15:24:51: Start-up 1/4/10
Message-ID: <mailman.1356.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

Replaced UV lamp. Adjusted lamp position for max intensity. Calibrated lamp power supply for 15.0 Mw/cm2. Uniformity at .69%



From khskoo at snf.stanford.edu  Sat Jan  9 01:31:23 2010
From: khskoo at snf.stanford.edu (khskoo at snf.stanford.edu)
Date: Sat, 9 Jan 2010 01:31:23 -0800
Subject: Problem karlsuss SNF 2010-01-09 01:31:22: 
Message-ID: <mailman.1357.1357938459.25750.karlsuss-pcs@snf.stanford.edu>




From khskoo at snf.stanford.edu  Sat Jan  9 01:34:26 2010
From: khskoo at snf.stanford.edu (khskoo at snf.stanford.edu)
Date: Sat, 9 Jan 2010 01:34:26 -0800
Subject: Shutdown karlsuss SNF 2010-01-09 01:34:25: Karlsuss1 shutdown
Message-ID: <mailman.1358.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

Karlsuss1 is shutdown. 



From vilanova at snf.stanford.edu  Mon Jan 11 07:47:34 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 11 Jan 2010 07:47:34 -0800
Subject: Shutdown karlsuss SNF 2010-01-09 01:34:25: Karlsuss1 shutdown
Message-ID: <mailman.1359.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

Lamp calibration performed. 



From vilanova at snf.stanford.edu  Mon Jan 11 07:47:47 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 11 Jan 2010 07:47:47 -0800
Subject: Problem karlsuss SNF 2010-01-09 01:31:22: 
Message-ID: <mailman.1360.1357938459.25750.karlsuss-pcs@snf.stanford.edu>




From jennyhu at snf.stanford.edu  Mon Jan 18 09:49:54 2010
From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu)
Date: Mon, 18 Jan 2010 09:49:54 -0800
Subject: Problem karlsuss SNF 2010-01-18 09:49:53: Lamp Life Failure
Message-ID: <mailman.1361.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

"Lamp Life" failure lights up during exposure.



From vilanova at snf.stanford.edu  Fri Jan 22 08:49:06 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 22 Jan 2010 08:49:06 -0800
Subject: Problem karlsuss SNF 2010-01-18 09:49:53: Lamp Life Failure
Message-ID: <mailman.1362.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

this was taking care of 2 days ago. 



From mkseo at snf.stanford.edu  Mon Jan 25 21:05:04 2010
From: mkseo at snf.stanford.edu (mkseo at snf.stanford.edu)
Date: Mon, 25 Jan 2010 21:05:04 -0800
Subject: Shutdown karlsuss SNF 2010-01-25 21:05:03: sudden power off
Message-ID: <mailman.1363.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

 The machine was turned off suddenly and then on again.
 After then, I cannot control the machine.



From vilanova at snf.stanford.edu  Tue Jan 26 07:55:00 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 26 Jan 2010 07:55:00 -0800
Subject: Shutdown karlsuss SNF 2010-01-25 21:05:03: sudden power off
Message-ID: <mailman.1364.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

checked system power  and checked lamp calibration and system functions , ok to use. 
becareful while handling the mask plate sometimes you could  hit the 
power button wihtout knowing it. and dont put any wafers boxes On top of the surface  control panel ,this could lead you to a system failure.