From gsosa at snf.stanford.edu Wed Jun 2 09:11:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 2 Jun 2010 09:11:17 -0700 Subject: Comment karlsuss SNF 2010-06-02 09:11:16: Status 6/2 Message-ID: We are expecting the the new display module to arrive tomorrow. From gsosa at snf.stanford.edu Fri Jun 4 09:49:13 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 4 Jun 2010 09:49:13 -0700 Subject: Shutdown karlsuss SNF 2010-05-28 00:41:25: Control panel screen went crazy again Message-ID: Replaced the front panel display module. Checked and adjusted brightness. Completed scheduled lamp change. peaked lamp intensity and calibrated lamp power supply for 15 mw/cm2. Uniformity: 2.6%. Loaded mask and wafer to test basic system operation. All OK. GS/MV From faridz at snf.stanford.edu Mon Jun 7 18:22:09 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 7 Jun 2010 18:22:09 -0700 Subject: Problem karlsuss SNF 2010-06-07 18:22:09: really bad focus Message-ID: unable to align due to bad focus ..... please check From vilanova at snf.stanford.edu Tue Jun 8 08:20:50 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Jun 2010 08:20:50 -0700 Subject: Problem karlsuss SNF 2010-06-07 18:22:09: really bad focus Message-ID: checked mask and wafer focus I wasnt able to repeat the User Problem, I will re check the system later today to see if the problem persist. From mahnaz at snf.stanford.edu Tue Jun 8 10:46:47 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 8 Jun 2010 10:46:47 -0700 Subject: Problem karlsuss SNF 2009-12-18 15:32:23: left side fine focus knob not working Message-ID: I should have cleared after the pm was done and today I tested the system to make sure all is ok. From mahnaz at snf.stanford.edu Tue Jun 8 10:49:18 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 8 Jun 2010 10:49:18 -0700 Subject: Problem karlsuss SNF 2009-10-21 12:00:47: right top objective focus knobs inop Message-ID: I like to clear this as we have not seen the issue after the pm was done in MAY OF 2010. From mahnaz at snf.stanford.edu Tue Jun 8 10:49:42 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 8 Jun 2010 10:49:42 -0700 Subject: Problem karlsuss SNF 2009-11-06 10:47:27: focus issue Message-ID: TAKEN CARE OF. From mahnaz at snf.stanford.edu Tue Jun 8 10:50:43 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 8 Jun 2010 10:50:43 -0700 Subject: Comment karlsuss SNF 2009-11-19 01:59:15: focus problem seems to be a wec issue Message-ID: THE WEC WAS REBUILD DURING THE PM IN MAY OF 2010. From mahnaz at snf.stanford.edu Tue Jun 8 10:51:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 8 Jun 2010 10:51:09 -0700 Subject: Comment karlsuss SNF 2010-06-08 10:51:08: I TESTED THE SYSTEM Message-ID: ALL CLEARED AND GOOD TO GO From dkozak at snf.stanford.edu Fri Jun 18 01:23:07 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Fri, 18 Jun 2010 01:23:07 -0700 Subject: Problem karlsuss SNF 2010-06-18 01:23:06: Frozen tool Message-ID: After focusing on mask, pressed "load". Tool stopped responding to any buttons after that. Mask left inside. From dkozak at snf.stanford.edu Fri Jun 18 01:57:43 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Fri, 18 Jun 2010 01:57:43 -0700 Subject: Problem karlsuss SNF 2010-06-18 01:57:43: system frozen, mask stuck inside Message-ID: Changed program to proximity, focused on mask, pressed "load". System froze and stopped responding to any buttons. Msak stuck inside. From yinliu at snf.stanford.edu Fri Jun 18 02:24:19 2010 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Fri, 18 Jun 2010 02:24:19 -0700 Subject: Problem karlsuss SNF 2010-06-18 02:24:18: mask holder can not be moved out Message-ID: From vilanova at snf.stanford.edu Fri Jun 18 08:02:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Jun 2010 08:02:21 -0700 Subject: Problem karlsuss SNF 2010-06-18 01:23:06: Frozen tool Message-ID: User mask was removed by Someone else,.Also FOund the system Under Proximity - Spacer Option, that Option is not available On the tool It is On the Software List But it does not work, becareful while Using or changing your Exposure time hard contact , Soft contact Alignment Gap etc. chekced MIcroscope and tool Operation Aligned wafer and Exposed , Tool Working Fine,. Ok to use. From vilanova at snf.stanford.edu Fri Jun 18 08:02:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Jun 2010 08:02:27 -0700 Subject: Problem karlsuss SNF 2010-06-18 01:57:43: system frozen, mask stuck inside Message-ID: User mask was removed by Someone else,.Also FOund the system Under Proximity - Spacer Option, that Option is not available On the tool It is On the Software List But it does not work, becareful while Using or changing your Exposure time hard contact , Soft contact Alignment Gap etc. chekced MIcroscope and tool Operation Aligned wafer and Exposed , Tool Working Fine,. Ok to use. From vilanova at snf.stanford.edu Fri Jun 18 08:02:34 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Jun 2010 08:02:34 -0700 Subject: Problem karlsuss SNF 2010-06-18 02:24:18: mask holder can not be moved out Message-ID: User mask was removed by Someone else,.Also FOund the system Under Proximity - Spacer Option, that Option is not available On the tool It is On the Software List But it does not work, becareful while Using or changing your Exposure time hard contact , Soft contact Alignment Gap etc. chekced MIcroscope and tool Operation Aligned wafer and Exposed , Tool Working Fine,. Ok to use. From dton at snf.stanford.edu Sun Jun 27 15:30:30 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sun, 27 Jun 2010 15:30:30 -0700 Subject: Problem karlsuss SNF 2010-06-27 15:30:29: back side alignment Message-ID: There is some shifting of the right microscope. Things doesn't seem to lign up ... When you move the wafer up and down you can see the images move side way. Dinh From vilanova at snf.stanford.edu Mon Jun 28 08:06:09 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Jun 2010 08:06:09 -0700 Subject: Problem karlsuss SNF 2010-06-27 15:30:29: back side alignment Message-ID: checked top and back side alignment and I could not repeat the user problem, DOnt know if he or she was running a wafer or pieces but I've checked the wafer Aligment And I dont see a problem with it. User has to come back and show us the problem so we can help him /her with it. From gsosa at snf.stanford.edu Tue Jun 29 11:44:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 29 Jun 2010 11:44:00 -0700 Subject: Comment karlsuss SNF 2010-06-29 11:43:59: Lamp Change 6/28 Message-ID: Replaced exposure lamp. Also replaced the elipsoid reflector. There was a slight improvement of lamp intensity vs power. Max intensity of 20 mw/cm2 at 425 watts. Set lamp intensity to 15.0 mw/cm2. Uniformity: 0.99%