Shutdown karlsuss SNF 2010-05-28 00:41:25: Control panel screen went crazy again

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 4 09:49:13 PDT 2010


Replaced the front panel display module. Checked and adjusted brightness. Completed scheduled lamp change. peaked lamp intensity and calibrated lamp power supply for 15 mw/cm2. Uniformity: 2.6%. Loaded mask and wafer to test  basic system operation. All OK.  GS/MV




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