Problem karlsuss SNF 2010-06-18 01:57:43: system frozen, mask stuck inside

vilanova at vilanova at
Fri Jun 18 08:02:27 PDT 2010

User mask was removed by Someone else,.Also FOund the system
 Under Proximity - Spacer Option, that Option is not available
On the tool It is On the Software List But it does not work, becareful
while Using or changing your Exposure time hard contact , Soft contact
Alignment Gap etc. chekced MIcroscope and tool Operation 
Aligned wafer and Exposed , Tool  Working Fine,. Ok to use. 

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