From gsosa at snf.stanford.edu  Fri Mar 12 09:06:24 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 12 Mar 2010 09:06:24 -0800
Subject: Shutdown karlsuss SNF 2010-03-12 09:06:23: Z axis overcurrent
Message-ID: <mailman.1367.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

Troubleshooting the system.



From gsosa at snf.stanford.edu  Fri Mar 12 11:28:52 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 12 Mar 2010 11:28:52 -0800
Subject: Shutdown karlsuss SNF 2010-03-12 09:06:23: Z axis overcurrent
Message-ID: <mailman.1368.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

Reset system parameters. Powered up and initialized the tool . All OK. Completed lamp change procedue. Intensity at 15.0 Mw/cm2, Uniformity = 1.7%. Also replaced the inflating gasket on the pieces chuck for use in vacuum contact mode.



From gsosa at snf.stanford.edu  Fri Mar 12 15:31:24 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 12 Mar 2010 15:31:24 -0800
Subject: Shutdown karlsuss SNF 2010-03-12 15:31:24: Microscope lamps not working
Message-ID: <mailman.1369.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

None of the microscope lamps are working(top and bottom) checked the obvious fuses and connections. Cycled power. Still no good. Checked lamps- OK. Still do not light up. Need to troubleshoot.



From gsosa at snf.stanford.edu  Mon Mar 15 14:05:57 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 15 Mar 2010 14:05:57 -0700
Subject: Shutdown karlsuss SNF 2010-03-12 15:31:24: Microscope lamps not working
Message-ID: <mailman.1370.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

cycled circuit breakers at rear of system.  powered up the system. now top and bottom microscope lamps are working., Possibly, the breaker is going bad or a relay to the microscope illumination board is not kicking in. Cycle a dummy wafer through the system. All looks OK.



From srikantv at snf.stanford.edu  Mon Mar 29 17:49:02 2010
From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu)
Date: Mon, 29 Mar 2010 17:49:02 -0700
Subject: Comment karlsuss SNF 2010-03-29 17:49:02: loading problem
Message-ID: <mailman.1371.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

rubber tubing inside equipment prevents smooth loading of wafer



From vilanova at snf.stanford.edu  Tue Mar 30 14:15:18 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 30 Mar 2010 14:15:18 -0700
Subject: Comment karlsuss SNF 2010-03-29 17:49:02: loading problem
Message-ID: <mailman.1372.1357938459.25750.karlsuss-pcs@snf.stanford.edu>

the cable has been moved out of the way , loading and Unloading
wafer problem , ok now. Good to use.