Shutdown karlsuss SNF 2010-03-12 09:06:23: Z axis overcurrent

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 12 11:28:52 PST 2010


Reset system parameters. Powered up and initialized the tool . All OK. Completed lamp change procedue. Intensity at 15.0 Mw/cm2, Uniformity = 1.7%. Also replaced the inflating gasket on the pieces chuck for use in vacuum contact mode.




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