Shutdown karlsuss SNF 2010-03-12 15:31:24: Microscope lamps not working

gsosa at gsosa at
Mon Mar 15 14:05:57 PDT 2010

cycled circuit breakers at rear of system.  powered up the system. now top and bottom microscope lamps are working., Possibly, the breaker is going bad or a relay to the microscope illumination board is not kicking in. Cycle a dummy wafer through the system. All looks OK.

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