From altamash at snf.stanford.edu Sat May 1 16:48:36 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 1 May 2010 16:48:36 -0700 Subject: Comment karlsuss SNF 2010-05-01 16:48:35: alignment better than ks2 Message-ID: From vilanova at snf.stanford.edu Mon May 3 07:39:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 May 2010 07:39:20 -0700 Subject: Shutdown karlsuss SNF 2010-05-02 20:30:17: Frozen State Message-ID: the micrometer were not aligned properly ( X and Y ) T = In Range X Out of Range Y Out of range this means that in order to continue with the machine set up the micrometer need to be center X = 10 , Y = 10 ) Aligned Micrometers and tested machine, Ok to use. From gth at snf.stanford.edu Tue May 4 21:40:24 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 4 May 2010 21:40:24 -0700 Subject: Problem karlsuss SNF 2010-05-04 21:40:23: lamp failure red light. Message-ID: From vilanova at snf.stanford.edu Wed May 5 08:45:56 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 May 2010 08:45:56 -0700 Subject: Problem karlsuss SNF 2010-05-04 21:40:23: lamp failure red light. Message-ID: re-calibrated lamp, ok to use. From vilanova at snf.stanford.edu Wed May 5 10:04:41 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 May 2010 10:04:41 -0700 Subject: Shutdown karlsuss SNF 2010-05-05 10:04:40: FSE Eng. Is here Message-ID: Suss FSE is here to work on some of the Alignment Issues. Sorry for the Inconvinience but we have to take over both machines. From mahnaz at snf.stanford.edu Wed May 5 17:16:26 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 5 May 2010 17:16:26 -0700 Subject: Shutdown karlsuss SNF 2010-05-05 10:04:40: FSE Eng. Is here Message-ID: Same as before, even FSE is confused. I shot few wafers the ring still there. He did find breakage to the hose that supplies vacuum to chuck but I guess that was not the issue as much. Decided back to work on the system tomorrow. Ok to use with non critical work. From vilanova at snf.stanford.edu Thu May 6 08:59:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 May 2010 08:59:49 -0700 Subject: Shutdown karlsuss SNF 2010-05-06 08:59:48: FSE guys are here... Message-ID: From mahnaz at snf.stanford.edu Thu May 6 16:59:40 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 6 May 2010 16:59:40 -0700 Subject: Shutdown karlsuss SNF 2010-05-06 08:59:48: FSE guys are here... Message-ID: I will send the report tomorrow, good for now. report any issues and please do not touch any thing that is not in the procedure. From fungus at snf.stanford.edu Fri May 7 10:42:57 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Fri, 7 May 2010 10:42:57 -0700 Subject: Problem karlsuss SNF 2010-05-07 10:42:56: objective not moving, mask pin Message-ID: objective does not appear to be able to move also one of the pins that help align mask is gone. From mahnaz at snf.stanford.edu Fri May 7 11:15:19 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:15:19 -0700 Subject: Comment karlsuss SNF 2010-04-06 15:35:54: wec looks good Message-ID: From mahnaz at snf.stanford.edu Fri May 7 11:15:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:15:53 -0700 Subject: Problem karlsuss SNF 2010-04-21 14:39:35: cannot focus on both wafer and mask at 20x Message-ID: Here is an update on the work we did on karlsuss 1 the last few days. The WEC head was out of order, so was removed and rebuild. Many adjustment was made to areas that usually should not be adjusted. Found a tear on the vacuum line to the mask holder and corrected that. Adjusted throttle on nitrogen flow from 1 turn to 2 turns flow. after all these adjustment i still was not happy with resolution when we tried different mask holder it al looked better. I took the original light weighted mask holder out and replaced it with another one that we had gotten a a donation while back. Please do not bang or drop the mask holder on the table. Please let us know of any problem and issues with the system and let Gary and Mario know about first. From mahnaz at snf.stanford.edu Fri May 7 11:27:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:27:41 -0700 Subject: Problem karlsuss SNF 2010-04-21 15:44:56: Focus issues Message-ID: noted From mahnaz at snf.stanford.edu Fri May 7 11:27:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:27:50 -0700 Subject: Comment karlsuss SNF 2010-04-26 15:39:24: Update 4/26 Message-ID: From mahnaz at snf.stanford.edu Fri May 7 11:28:01 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:28:01 -0700 Subject: Problem karlsuss SNF 2010-04-28 16:24:23: No Critical work Message-ID: noted From mahnaz at snf.stanford.edu Fri May 7 11:28:17 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 May 2010 11:28:17 -0700 Subject: Comment karlsuss SNF 2010-05-01 16:48:35: alignment better than ks2 Message-ID: From vilanova at snf.stanford.edu Fri May 7 14:03:35 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 7 May 2010 14:03:35 -0700 Subject: Problem karlsuss SNF 2010-05-07 10:42:56: objective not moving, mask pin Message-ID: We 've Replaced The Missing mask holder vacuum PIn , and checked top and Bottom Objectives , Both of them Are working fine. From mahnaz at snf.stanford.edu Thu May 20 14:20:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 20 May 2010 14:20:51 -0700 Subject: Shutdown karlsuss SNF 2010-05-20 14:20:51: it seems there is WEC issue Message-ID: From gsosa at snf.stanford.edu Thu May 20 14:31:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 May 2010 14:31:41 -0700 Subject: Shutdown karlsuss SNF 2010-05-20 14:20:51: it seems there is WEC issue Message-ID: Error " No alignment check without WEC" . Reset the system. This error is dispayed if the "Alignment Check " button is pushed when the tool is idle( No mask and wafer loaded). Error can be cleared by pressing the "Enter " button. System will go back to "ready state" From xhlim at snf.stanford.edu Tue May 25 19:55:26 2010 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Tue, 25 May 2010 19:55:26 -0700 Subject: Comment karlsuss SNF 2010-05-25 19:55:25: System being strange Message-ID: Panel shows weird messages which are not readable. From vilanova at snf.stanford.edu Wed May 26 08:35:36 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 May 2010 08:35:36 -0700 Subject: Comment karlsuss SNF 2010-05-25 19:55:25: System being strange Message-ID: System was showing some wierd characters Re inialized system and I noticed that the Y MIcrometer wouldnt travel all the way in The Y MIcrometer was missing the ball at the end of the MIcrometer tip, I Found it right next to the vacuum hoses Re installed the MIcrometer Tip and tested, System back to normal. From slcheng at snf.stanford.edu Wed May 26 13:14:52 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 26 May 2010 13:14:52 -0700 Subject: Shutdown karlsuss SNF 2010-05-26 13:14:51: display gone crazy Message-ID: not legible, Gary repaired it briefly. One exposure went ok and then the rest of the wafers - crazy display did blanket exposure - no alignment. From gsosa at snf.stanford.edu Wed May 26 16:13:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 May 2010 16:13:02 -0700 Subject: Comment karlsuss SNF 2010-05-26 16:13:00: Tool Status 5/26 Message-ID: The aligner is down for a display problem. Suspect a bad display board or display drive board. All key functions work correctly. Only dispayed information is illegible. From vilanova at snf.stanford.edu Thu May 27 14:54:43 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 May 2010 14:54:43 -0700 Subject: Shutdown karlsuss SNF 2010-05-26 13:14:51: display gone crazy Message-ID: We've been testing the display All Afternoon and after checking all the boards connectors the display has been Ok , I will yellow light the system so people can Use it, But if the Display goes crazy Again Shut it down On Coral. From khskoo at snf.stanford.edu Fri May 28 00:41:25 2010 From: khskoo at snf.stanford.edu (khskoo at snf.stanford.edu) Date: Fri, 28 May 2010 00:41:25 -0700 Subject: Shutdown karlsuss SNF 2010-05-28 00:41:25: Control panel screen went crazy again Message-ID: It went crazy when I start to change the parameters From gsosa at snf.stanford.edu Fri May 28 13:15:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 28 May 2010 13:15:52 -0700 Subject: Comment karlsuss SNF 2010-05-28 13:15:52: Status 5/28 Message-ID: The tool is down for a display problem. The new display module has been ordered and is being shipped from Germany. Expect delivery next week.