Shutdown karlsuss SNF 2010-05-05 10:04:40: FSE Eng. Is here

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed May 5 17:16:26 PDT 2010


Same as before, even FSE is confused. I shot few wafers the ring still there. He did find  breakage to the  hose that supplies  vacuum to chuck but I guess that was not the issue as much.
Decided back to work on the system tomorrow.
Ok to use with non critical work.




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