Shutdown karlsuss SNF 2010-05-20 14:20:51: it seems there is WEC issue

gsosa at gsosa at
Thu May 20 14:31:41 PDT 2010

Error " No alignment check without WEC" . Reset the system. This error is dispayed if the "Alignment  Check " button is pushed when the tool is idle( No mask and wafer loaded). Error can be cleared by pressing the "Enter " button. System will go back to "ready state" 

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