Shutdown karlsuss SNF 2010-05-26 13:14:51: display gone crazy

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed May 26 13:14:52 PDT 2010


not legible, Gary repaired it briefly. 
One exposure went ok and then the rest of the wafers - crazy display
did blanket exposure - no alignment.




More information about the karlsuss-pcs mailing list