Shutdown karlsuss SNF 2010-05-26 13:14:51: display gone crazy

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed May 26 13:14:52 PDT 2010

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not legible, Gary repaired it briefly. 
One exposure went ok and then the rest of the wafers - crazy display
did blanket exposure - no alignment.

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