From smitmegh at snf.stanford.edu Sat Oct 9 13:32:22 2010 From: smitmegh at snf.stanford.edu (smitmegh at snf.stanford.edu) Date: Sat, 9 Oct 2010 13:32:22 -0700 Subject: Problem karlsuss SNF 2010-10-09 13:32:21: Error: "Watch Out, Center Chuck Manual" Message-ID: Machine displaying message "Watch Out" "center chuck manual" and is unresponsive. Was attempting to align mas and wafer when error occurred. From vilanova at snf.stanford.edu Mon Oct 11 08:07:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:07:49 -0700 Subject: Problem karlsuss SNF 2010-10-09 13:32:21: Error: "Watch Out, Center Chuck Manual" Message-ID: System was back to normal when I came In , Sometimes IF you START PRESSING All the buttons at once the system will get confuse,Please Follow the Command Prompts On the screen , Ok to use. From minchieh at snf.stanford.edu Tue Oct 19 08:19:10 2010 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Tue, 19 Oct 2010 08:19:10 -0700 Subject: Problem karlsuss SNF 2010-10-19 08:19:10: BSA right light bulb off Message-ID: From gsosa at snf.stanford.edu Tue Oct 19 08:30:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Oct 2010 08:30:55 -0700 Subject: Problem karlsuss SNF 2010-10-19 08:19:10: BSA right light bulb off Message-ID: Checked and replaced burned out bulb. From vilanova at snf.stanford.edu Wed Oct 20 14:35:55 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Oct 2010 14:35:55 -0700 Subject: Comment karlsuss SNF 2010-10-20 14:35:54: monthly lamp change and calibration Message-ID: monthly lamp change and calibration results: Intensity 15.0Cm/w2 Uniformity = 2.2% From minchieh at snf.stanford.edu Fri Oct 22 14:28:09 2010 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Fri, 22 Oct 2010 14:28:09 -0700 Subject: Problem karlsuss SNF 2010-10-22 14:28:09: BSA objective doesn't move left & right Message-ID: From gsosa at snf.stanford.edu Fri Oct 22 15:54:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 Oct 2010 15:54:54 -0700 Subject: Problem karlsuss SNF 2010-10-22 14:28:09: BSA objective doesn't move left & right Message-ID: BSA microscopes at outer limits. Moved each one in individually to clear limit error. Reset all hardware. From merwan at snf.stanford.edu Tue Oct 26 17:23:24 2010 From: merwan at snf.stanford.edu (merwan at snf.stanford.edu) Date: Tue, 26 Oct 2010 17:23:24 -0700 Subject: Shutdown karlsuss SNF 2010-10-26 17:23:23: Emergency stop button hit Message-ID: Unattentionnal activation of the Emergency stop From gsosa at snf.stanford.edu Wed Oct 27 07:50:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 07:50:32 -0700 Subject: Shutdown karlsuss SNF 2010-10-26 17:23:23: Emergency stop button hit Message-ID: System and lamp powered up. Full hardware reset. Lamp stabilized and intensity check- OK at 15.0 Mw/cm2. From gsosa at snf.stanford.edu Wed Oct 27 15:16:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 Oct 2010 15:16:34 -0700 Subject: Comment karlsuss SNF 2010-10-27 15:16:34: Replaced TSA Lamp Message-ID: No light on TSA microscope. Checked and found burned out bulb. Replaced lamp. Checked TSA microscope with test mask- OK