From ntayebi at snf.stanford.edu Sun Sep 19 12:24:21 2010 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 19 Sep 2010 12:24:21 -0700 Subject: Problem karlsuss SNF 2010-09-19 12:24:21: stage not moving Message-ID: After I finished exposing, the stage was blocked and I could not move it. I a`had a message saying watch out. I'm not sure what it is. I moved to Karlsuss2 which worked well From vilanova at snf.stanford.edu Mon Sep 20 07:30:00 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2010 07:30:00 -0700 Subject: Problem karlsuss SNF 2010-09-19 12:24:21: stage not moving Message-ID: MIcrometers were moved OUt of range , Reseted MIcrometer (X = 10) (Y = 10) Pressed Enterr, System working fine, ok to use. From vilanova at snf.stanford.edu Wed Sep 22 08:58:32 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Sep 2010 08:58:32 -0700 Subject: Shutdown karlsuss SNF 2010-09-22 08:58:32: Monthly Lamp Change + Calibration in progress... Message-ID: From vilanova at snf.stanford.edu Wed Sep 22 09:27:29 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Sep 2010 09:27:29 -0700 Subject: Shutdown karlsuss SNF 2010-09-22 08:58:32: Monthly Lamp Change + Calibration in progress... Message-ID: Monthly Lamp and calibration Completed: Intensity Average = 15.0 Mw/Cm2 Uniformity = 1.6% From jasonlin at snf.stanford.edu Sun Sep 26 16:09:36 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 26 Sep 2010 16:09:36 -0700 Subject: Problem karlsuss SNF 2010-09-26 16:09:36: Banging Sound Message-ID: During exposure (Vac Ct program), it made banging sounds. I switched to karlsuss2 after the first wafer. From vilanova at snf.stanford.edu Mon Sep 27 07:54:16 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Sep 2010 07:54:16 -0700 Subject: Problem karlsuss SNF 2010-09-26 16:09:36: Banging Sound Message-ID: Cleaned WEC ( Found a lot of wafer pieces Inside,That probably were blocking the wec to come up Smoothly. Aligned mask and exposed a few wafers, I could not hear any NOise other than the normal one, Ok to use. From zpatel at snf.stanford.edu Wed Sep 29 12:39:05 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 29 Sep 2010 12:39:05 -0700 Subject: Comment karlsuss SNF 2010-09-29 12:39:05: Optical microscope light off Message-ID: From gsosa at snf.stanford.edu Thu Sep 30 13:50:40 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Sep 2010 13:50:40 -0700 Subject: Comment karlsuss SNF 2010-09-29 12:39:05: Optical microscope light off Message-ID: Tested both top and bottom microscope illumination. All working OK. Also replaced missing locating pin on mask holder.