Comment karlsuss SNF 2011-04-03 00:17:07: full wafer chuck broken

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Apr 3 00:17:08 PDT 2011


One of the full wafer chucks (the one without the red ring around it) is broken- it does not pull vacuum. This can be an issue when users are on both machines and both need to use the same chuck, as happened tonight.




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