Comment karlsuss SNF 2011-04-03 00:17:07: full wafer chuck broken

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 4 09:31:15 PDT 2011


the chuck was dirty full , cleaned up with Isopropyl and started 
to work fine, I found some resist spots on it as well.
It would be good to clean up the chuck before and after every use. 
tested ok ready to use. 




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