Problem karlsuss SNF 2011-02-18 18:36:29:

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 23 08:31:10 PST 2011


The RIght and Left Iluminator pegs were MOved  TO an Off position,
 System probably Froze Because 2 buttons might been pushed during process, Re started System and checked Split Iluminators. Both
Working Ok, , as for the several MIcrons off In "Y" I couldnt repeat
the Problem , will keep an eye on it to see if it was the user Wafer or
a Mechanical system error. 




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