Problem karlsuss SNF 2011-02-22 22:43:01: the keyboard does not work

[vilanova at snf.stanford.edu]

The RIght and Left Iluminator pegs were MOved  TO an Off position,
 System probably Froze Because 2 buttons might been pushed during process, Re started System and checked Split Iluminators. Both
Working Ok, , as for the several MIcrons off In "Y" I couldnt repeat
the Problem , will keep an eye on it to see if it was the user Wafer or
a Mechanical system error.