From gsosa at snf.stanford.edu  Tue Jan  4 08:02:34 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 4 Jan 2011 08:02:34 -0800
Subject: Comment karlsuss SNF 2011-01-04 08:02:33: Scheduled lamp change 1/3
Message-ID: <mailman.1474.1357938460.25750.karlsuss-pcs@snf.stanford.edu>

UV lamp replaced and set up.
 Uniformity: 1.0%
 Ave Intensity: 14.84



From mahnaz at snf.stanford.edu  Tue Jan  4 10:19:15 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 4 Jan 2011 10:19:15 -0800
Subject: Comment karlsuss SNF 2011-01-04 10:19:14: 1um 3612 with 1 second
Message-ID: <mailman.1475.1357938460.25750.karlsuss-pcs@snf.stanford.edu>

exposure looks good.
system will get pm 1/5/11



From gsosa at snf.stanford.edu  Wed Jan  5 08:54:51 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 5 Jan 2011 08:54:51 -0800
Subject: Shutdown karlsuss SNF 2011-01-05 08:54:50: PM in Progress
Message-ID: <mailman.1476.1357938460.25750.karlsuss-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Wed Jan  5 16:27:31 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 5 Jan 2011 16:27:31 -0800
Subject: Shutdown karlsuss SNF 2011-01-05 08:54:50: PM in Progress
Message-ID: <mailman.1477.1357938460.25750.karlsuss-pcs@snf.stanford.edu>

PM completed by vendor.



From mahnaz at snf.stanford.edu  Thu Jan  6 11:20:51 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 6 Jan 2011 11:20:51 -0800
Subject: Comment karlsuss SNF 2011-01-06 11:20:51: Test result
Message-ID: <mailman.1478.1357938460.25750.karlsuss-pcs@snf.stanford.edu>

After Pm was down ran wafers and adjusted the hard contact pressure 1/2 round counter clock wise.
was able to resolve 1 um 3612 in all 5 sites.
happy processing.