From altamash at snf.stanford.edu Tue Jul 5 19:02:45 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 5 Jul 2011 19:02:45 -0700 Subject: Comment karlsuss SNF 2011-07-05 19:02:45: SOmebody left the chuck with yellow tape still on Message-ID: From vilanova at snf.stanford.edu Wed Jul 6 08:46:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Jul 2011 08:46:28 -0700 Subject: Comment karlsuss SNF 2011-07-05 19:02:45: SOmebody left the chuck with yellow tape still on Message-ID: Cleaned Both Karlsuss # 1and 2 chucks and chuck plate and mask holders. From vilanova at snf.stanford.edu Tue Jul 12 11:47:53 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 Jul 2011 11:47:53 -0700 Subject: Comment karlsuss SNF 2011-07-12 11:47:53: Deep UV Mode Message-ID: We Set Up the system to Deep UV mode, Unfortunaly Both lamps that we have were Working at all because they're old ( Didnt Fired Up ) I Deleted the Reservations and I Put back the normal MOde lamp , Recalibrated lamp Average Intensity 15Mw/Cm2 Uniformity = 1.47% Ok to use From gth672n at snf.stanford.edu Thu Jul 21 12:08:05 2011 From: gth672n at snf.stanford.edu (gth672n at snf.stanford.edu) Date: Thu, 21 Jul 2011 12:08:05 -0700 Subject: Comment karlsuss SNF 2011-07-21 12:08:04: resistance loading wafer into system Message-ID: I experienced a lot of resistance trying to get the wafer back into the system after loading. It's like the WEC is up and actively pressing against the chuck or something. From gth672n at snf.stanford.edu Thu Jul 21 12:26:43 2011 From: gth672n at snf.stanford.edu (gth672n at snf.stanford.edu) Date: Thu, 21 Jul 2011 12:26:43 -0700 Subject: Problem karlsuss SNF 2011-07-21 12:26:43: can't load chuck back into system Message-ID: I am encountering a lot of resistance trying to load the wafer chuck back into the system after loading my wafer. It's like the WEC is already pushing against the chuck before I can even get it in. From vilanova at snf.stanford.edu Thu Jul 21 13:17:46 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2011 13:17:46 -0700 Subject: Problem karlsuss SNF 2011-07-21 12:26:43: can't load chuck back into system Message-ID: Maskloader cable was out of position , adjusted it and tried it 5 times, ok to use . From vilanova at snf.stanford.edu Wed Jul 27 09:08:52 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:08:52 -0700 Subject: Comment karlsuss SNF 2011-07-27 09:08:51: Found Left BSa light Burned out during Daily Inspections Message-ID: Found Left BSa light Burned out during Daily Inspections, Replaced it and tested, Ok to use.