Comment karlsuss SNF 2011-07-21 12:08:04: resistance loading wafer into system

gth672n at snf.stanford.edu gth672n at snf.stanford.edu
Thu Jul 21 12:08:05 PDT 2011


I experienced a lot of resistance trying to get the wafer back into the system after loading.  It's like the WEC is up and actively pressing against the chuck or something.




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