Problem karlsuss SNF 2011-07-21 12:26:43: can't load chuck back into system

gth672n at snf.stanford.edu gth672n at snf.stanford.edu
Thu Jul 21 12:26:43 PDT 2011


I am encountering a lot of resistance trying to load the wafer chuck back into the system after loading my wafer.  It's like the WEC is already pushing against the chuck before I can even get it in.




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