Problem karlsuss SNF 2011-07-21 12:26:43: can't load chuck back into system

gth672n at gth672n at
Thu Jul 21 12:26:43 PDT 2011

I am encountering a lot of resistance trying to load the wafer chuck back into the system after loading my wafer.  It's like the WEC is already pushing against the chuck before I can even get it in.

More information about the karlsuss-pcs mailing list