From dton at snf.stanford.edu Tue Jun 7 19:30:01 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 7 Jun 2011 19:30:01 -0700 Subject: Problem karlsuss SNF 2011-06-07 19:30:01: Right side doesn't seem to be on contact with wafers Message-ID: Trying to expose my wafers. Somehow, I can see on the right side, the mask has a shadow -- on the TV monitor. I can't seem to align my wafers good enough to what I want so I gave up. Dinh From mahnaz at snf.stanford.edu Wed Jun 8 08:52:32 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 08:52:32 -0700 Subject: Shutdown karlsuss SNF 2011-06-08 08:52:31: report of misalignment Message-ID: Mario and I working on it. From mahnaz at snf.stanford.edu Wed Jun 8 10:04:28 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 10:04:28 -0700 Subject: Shutdown karlsuss SNF 2011-06-08 08:52:31: report of misalignment Message-ID: Mario adjusted the screws on the stage( they were totally loose). Y macrometer was totally out, was adjusted. Mario checked the lamp uniformity is within spec. 15mw. and 2% I tested the system with 3612 1 um , 1.1 seconds of exposure and resolved 2 um line and space. cleaned the system off all the tapes !!!!! From mahnaz at snf.stanford.edu Wed Jun 8 10:05:26 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 10:05:26 -0700 Subject: Problem karlsuss SNF 2011-06-07 19:30:01: Right side doesn't seem to be on contact with wafers Message-ID: Mario adjusted the stage and y macrometer. we ran a test and 2 um resolved. From mahnaz at snf.stanford.edu Wed Jun 8 10:06:20 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 10:06:20 -0700 Subject: Problem karlsuss SNF 2011-05-13 16:42:55: WEC slightly off? Message-ID: noted earlier ran atest today and looks okay. From mahnaz at snf.stanford.edu Wed Jun 8 10:07:29 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Jun 2011 10:07:29 -0700 Subject: Problem karlsuss SNF 2011-05-18 11:55:46: wec is slightly out Message-ID: has been adjusted and i ran a test seems okay. From rcchen at snf.stanford.edu Thu Jun 9 11:11:18 2011 From: rcchen at snf.stanford.edu (rcchen at snf.stanford.edu) Date: Thu, 9 Jun 2011 11:11:18 -0700 Subject: Comment karlsuss SNF 2011-06-09 11:11:18: lamp out Message-ID: Mario is changing the backside lamp From vilanova at snf.stanford.edu Thu Jun 9 11:17:48 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Jun 2011 11:17:48 -0700 Subject: Comment karlsuss SNF 2011-06-09 11:11:18: lamp out Message-ID: replaced bad Backside lamp, ok to use. From amroy at snf.stanford.edu Mon Jun 13 16:49:51 2011 From: amroy at snf.stanford.edu (amroy at snf.stanford.edu) Date: Mon, 13 Jun 2011 16:49:51 -0700 Subject: Problem karlsuss SNF 2011-06-13 16:49:50: Mask vacuum lost Message-ID: My mask came off onto the chuck after the exposure From vilanova at snf.stanford.edu Tue Jun 14 08:11:33 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Jun 2011 08:11:33 -0700 Subject: Problem karlsuss SNF 2011-06-13 16:49:50: Mask vacuum lost Message-ID: Mask Holder and chuck were dirty , Cleaned them up and exposed wafer , mask holde and wafer vacuum are working Fine, Exposed another wafer, system working Fine, Ok to use. From vilanova at snf.stanford.edu Thu Jun 23 08:56:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 08:56:57 -0700 Subject: Shutdown karlsuss SNF 2011-06-23 08:56:56: monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Jun 23 09:21:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 09:21:37 -0700 Subject: Comment karlsuss SNF 2011-06-23 09:21:36: Monthly Lamp change and calibration Completed Message-ID: Monthly Lamp Calibration Completed : Average Intensity = 15.0Mw/Cm2 Uniformity = 1% From vilanova at snf.stanford.edu Thu Jun 23 09:21:57 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Jun 2011 09:21:57 -0700 Subject: Shutdown karlsuss SNF 2011-06-23 08:56:56: monthly lamp change in progress.... Message-ID: Monthly Lamp Calibration Completed : Average Intensity = 15.0Mw/Cm2 Uniformity = 1% From gsosa at snf.stanford.edu Mon Jun 27 08:58:20 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Jun 2011 08:58:20 -0700 Subject: Shutdown karlsuss SNF 2011-06-27 08:58:19: 6 Month PM Message-ID: 6 Month PM From gsosa at snf.stanford.edu Mon Jun 27 15:31:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Jun 2011 15:31:15 -0700 Subject: Shutdown karlsuss SNF 2011-06-27 08:58:19: 6 Month PM Message-ID: Vendor PM completed. WEC rebuilt. Resolution test OK by Mahnaz. 3612 resist 1.0 micron exposure @ 1.1 second.