Shutdown karlsuss SNF 2011-06-08 08:52:31: report of misalignment
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Wed Jun 8 08:52:32 PDT 2011
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Problem karlsuss SNF 2011-06-07 19:30:01: Right side doesn't seem to be on contact with wafers
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Shutdown karlsuss SNF 2011-06-08 08:52:31: report of misalignment
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Mario and I working on it.
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Problem karlsuss SNF 2011-06-07 19:30:01: Right side doesn't seem to be on contact with wafers
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Shutdown karlsuss SNF 2011-06-08 08:52:31: report of misalignment
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