Problem karlsuss SNF 2011-06-13 16:49:50: Mask vacuum lost

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jun 14 08:11:33 PDT 2011


Mask Holder and chuck were dirty  , Cleaned them up and
exposed wafer , mask holde and wafer vacuum are working 
Fine, Exposed another wafer, system working Fine, Ok to use. 




More information about the karlsuss-pcs mailing list