Problem karlsuss SNF 2011-06-13 16:49:50: Mask vacuum lost

vilanova at vilanova at
Tue Jun 14 08:11:33 PDT 2011

Mask Holder and chuck were dirty  , Cleaned them up and
exposed wafer , mask holde and wafer vacuum are working 
Fine, Exposed another wafer, system working Fine, Ok to use. 

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