Problem karlsuss SNF 2011-03-28 14:04:52: lamp non-uniformity

hector at snf.stanford.edu hector at snf.stanford.edu
Mon Mar 28 14:04:53 PDT 2011


1um resist on 3000A SiN on 1500A SiO2 on Si.
I exposed wafer for 1 sec with right side looking good and left side is under-exposed




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