Comment karlsuss SNF 2011-03-28 15:04:20: Monthly calibration Completed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 28 15:04:20 PDT 2011

Previous message: Shutdown karlsuss SNF 2011-03-28 14:23:46: monthly lamp change in progress...
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

MOnthly calibration Results :
Uniformity = 1.6%
Intensity = 15Mw/Cm2
I also cleaned Up the chuck and the chuck Insert area there 
was some photoresist on it.

Previous message: Shutdown karlsuss SNF 2011-03-28 14:23:46: monthly lamp change in progress...
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the karlsuss-pcs mailing list