Comment karlsuss SNF 2011-03-28 15:04:20: Monthly calibration Completed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 28 15:04:20 PDT 2011


MOnthly calibration Results :
Uniformity = 1.6%
Intensity = 15Mw/Cm2
I also cleaned Up the chuck and the chuck Insert area there 
was some photoresist on it. 




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