Shutdown karlsuss SNF 2011-03-28 14:23:46: monthly lamp change in progress...

vilanova at vilanova at
Mon Mar 28 15:04:32 PDT 2011

MOnthly calibration Results :
Uniformity = 1.6%
Intensity = 15Mw/Cm2
I also cleaned Up the chuck and the chuck Insert area there 
was some photoresist on it. 

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