Problem karlsuss SNF 2011-03-28 14:04:52: lamp non-uniformity
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Mar 28 15:04:37 PDT 2011
MOnthly calibration Results :
Uniformity = 1.6%
Intensity = 15Mw/Cm2
I also cleaned Up the chuck and the chuck Insert area there
was some photoresist on it.
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