Problem karlsuss SNF 2011-03-28 14:04:52: lamp non-uniformity

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 28 15:04:37 PDT 2011


MOnthly calibration Results :
Uniformity = 1.6%
Intensity = 15Mw/Cm2
I also cleaned Up the chuck and the chuck Insert area there 
was some photoresist on it. 




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