From npapte at snf.stanford.edu Tue May 3 21:19:51 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Tue, 3 May 2011 21:19:51 -0700 Subject: Problem karlsuss SNF 2011-05-03 21:19:51: right side BSA light bulb off Message-ID: From vilanova at snf.stanford.edu Wed May 4 07:57:58 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 May 2011 07:57:58 -0700 Subject: Problem karlsuss SNF 2011-05-03 21:19:51: right side BSA light bulb off Message-ID: Replaced BSA Light Bulb and tested. From lilihsu at snf.stanford.edu Fri May 13 16:42:55 2011 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Fri, 13 May 2011 16:42:55 -0700 Subject: Problem karlsuss SNF 2011-05-13 16:42:55: WEC slightly off? Message-ID: I exposed two wafers-- the ammout of exposure seemed to vary from right to left across the wafer. I cleaned my mask and tried again, same thing occured. It's fairly subtle, but I'm pretty sure the WEC is having difficulties. I tried exposing my wafers on KS2 and have not seen this problem, which says to me it is definately something with the tool. From alsune at snf.stanford.edu Fri May 13 18:52:19 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 13 May 2011 18:52:19 -0700 Subject: Problem karlsuss SNF 2011-05-13 18:52:18: Key won't responed Message-ID: While loading the sample, the system froze and it won't responed to any button. Didn't shutdown in case someone can fix it. From vilanova at snf.stanford.edu Sat May 14 07:29:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 14 May 2011 07:29:12 -0700 Subject: Problem karlsuss SNF 2011-05-13 18:52:18: Key won't responed Message-ID: System Frozen , Re-initialized System And test it ( microscope lamp chuck Etc) Everything back to normal, I 've made reservations to test and expose wafers On monday to see if we can repeat the User ( Lillhsu ) Problem, Ok to use. From mahnaz at snf.stanford.edu Wed May 18 11:55:46 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 18 May 2011 11:55:46 -0700 Subject: Problem karlsuss SNF 2011-05-18 11:55:46: wec is slightly out Message-ID: The last few times that we have tested the system, I did not get good result. Mario and Gary worked on it and shot a wafer yesterday which i looked at it this morning. The wafer they shot looked perfect in the center and left and right and okay on top and flat area. i thought to run one more wafer from the same batch of wafers which I did not get that result. After adjusting some of the setting I ran out of wafers . I decided to put the stetting back to original as it gave me the best result. If you expose wafers check the top and flat area and please comment on coral will be helpful. From helencxy at snf.stanford.edu Tue May 24 15:24:36 2011 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Tue, 24 May 2011 15:24:36 -0700 Subject: Problem karlsuss SNF 2011-05-24 15:24:36: Machine stopped responding to user input after the exposure Message-ID: My exposure went ok, was able to get the sample out. But then the machine stopped responding. Tried to take off the mask by clicking "change mask", but failed. Tried to disable and re-enable, the vaccum holding the mask went off so i was able to get my mask out, but the machine still seems to be frozen...not responding to any command. From hsyoon at snf.stanford.edu Tue May 24 21:45:44 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Tue, 24 May 2011 21:45:44 -0700 Subject: Shutdown karlsuss SNF 2011-05-24 21:45:44: keys are not responding Message-ID: only arrows are working From vilanova at snf.stanford.edu Wed May 25 08:31:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 May 2011 08:31:38 -0700 Subject: Shutdown karlsuss SNF 2011-05-24 21:45:44: keys are not responding Message-ID: Re-Initialized system , checked MIcroscopes ( Top and Bottom) Everything back to normal, I Replaced the lamp While at it ( MOnthly Lamp change ) and checked Intensity + Uniformity Here are the Results: Average Intensity = 15Mw/Cm2 Uniformity = 2.8% From vilanova at snf.stanford.edu Wed May 25 08:31:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 May 2011 08:31:44 -0700 Subject: Problem karlsuss SNF 2011-05-24 15:24:36: Machine stopped responding to user input after the exposure Message-ID: Re-Initialized system , checked MIcroscopes ( Top and Bottom) Everything back to normal, I Replaced the lamp While at it ( MOnthly Lamp change ) and checked Intensity + Uniformity Here are the Results: Average Intensity = 15Mw/Cm2 Uniformity = 2.8%