From suyog at snf.stanford.edu Sat Oct 1 23:32:11 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Sat, 1 Oct 2011 23:32:11 -0700 Subject: Problem karlsuss SNF 2011-10-01 23:32:10: Keys not responding Message-ID: From vilanova at snf.stanford.edu Mon Oct 3 07:57:25 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 Oct 2011 07:57:25 -0700 Subject: Problem karlsuss SNF 2011-10-01 23:32:10: Keys not responding Message-ID: Re Initialized System and tested and wafers Exposed, System ok, All Operations Ok, Ready to use. From vilanova at snf.stanford.edu Thu Oct 27 10:24:37 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:24:37 -0700 Subject: Shutdown karlsuss SNF 2011-10-27 10:24:37: lamp changed in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Oct 27 11:19:41 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 11:19:41 -0700 Subject: Shutdown karlsuss SNF 2011-10-27 10:24:37: lamp changed in progress.... Message-ID: Monthly Lamp Changed and calibration Completed. Lamp Change and Calibration Resutls = Lamp Average Intensity = 15Mw/Cm2 Uniformity = 2.56% From vilanova at snf.stanford.edu Thu Oct 27 11:19:58 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Oct 2011 11:19:58 -0700 Subject: Comment karlsuss SNF 2011-10-27 11:19:58: Monthly Lamp Changed and calibration Completed. Message-ID: Monthly Lamp Changed and calibration Completed. Lamp Change and Calibration Resutls = Lamp Average Intensity = 15Mw/Cm2 Uniformity = 2.56% From dton at snf.stanford.edu Mon Oct 31 17:22:08 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Mon, 31 Oct 2011 17:22:08 -0700 Subject: Problem karlsuss SNF 2011-10-31 17:22:07: Left backside lamp is not ON Message-ID: Could not expose wafers. Backside lamp (left) is bad. Dinh