Problem karlsuss SNF 2011-10-31 17:22:07: Left backside lamp is not ON

dton at snf.stanford.edu dton at snf.stanford.edu
Mon Oct 31 17:22:08 PDT 2011

Previous message: Comment karlsuss SNF 2011-10-27 11:19:58: Monthly Lamp Changed and calibration Completed.
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Could not expose wafers.  Backside lamp (left) is bad.
Dinh

Previous message: Comment karlsuss SNF 2011-10-27 11:19:58: Monthly Lamp Changed and calibration Completed.
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