From vilanova at snf.stanford.edu Tue Sep 13 07:49:00 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2011 07:49:00 -0700 Subject: Shutdown karlsuss SNF 2011-09-13 07:49:00: Monthly lamp change and calibration ......... Message-ID: From vilanova at snf.stanford.edu Tue Sep 13 08:55:25 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2011 08:55:25 -0700 Subject: Shutdown karlsuss SNF 2011-09-13 07:49:00: Monthly lamp change and calibration ......... Message-ID: Monthly Lamp changed and calibrated Calibration Report : Uniformity 1.11% Intensity = 15.0Mw/Cm2 From vilanova at snf.stanford.edu Tue Sep 13 08:55:40 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2011 08:55:40 -0700 Subject: Comment karlsuss SNF 2011-09-13 08:55:39: Monthly Lamp changed and calibrated Message-ID: Monthly Lamp changed and calibrated Calibration Report : Uniformity 1.11% Intensity = 15.0Mw/Cm2 From vilanova at snf.stanford.edu Tue Sep 13 08:56:12 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Sep 2011 08:56:12 -0700 Subject: Comment karlsuss SNF 2011-07-21 12:08:04: resistance loading wafer into system Message-ID: cleared , Took care of it Long time ago. From maxms at snf.stanford.edu Wed Sep 14 16:25:49 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 14 Sep 2011 16:25:49 -0700 Subject: Shutdown karlsuss SNF 2011-09-14 16:25:48: broken Message-ID: Mahnaz looked at it, told me to shutdown until tomorrow. From vilanova at snf.stanford.edu Thu Sep 15 08:08:14 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Sep 2011 08:08:14 -0700 Subject: Shutdown karlsuss SNF 2011-09-14 16:25:48: broken Message-ID: Lamp HOuse Was Out Of Home Position For some reason this was preventing the system to Boot Up in a proper sequence, MOved The lamp HOusing back to home position , The mask holder cable was also MOved OUt of Place , ReInstalled and tested. Re initialized system and tested Ok to use. From zzp at snf.stanford.edu Tue Sep 20 16:46:08 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Tue, 20 Sep 2011 16:46:08 -0700 Subject: Shutdown karlsuss SNF 2011-09-20 16:46:07: machine jammed Message-ID: reset to take out mask and wafer; now the machine is in a non-responding state. From gsosa at snf.stanford.edu Wed Sep 21 08:17:15 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 21 Sep 2011 08:17:15 -0700 Subject: Shutdown karlsuss SNF 2011-09-20 16:46:07: machine jammed Message-ID: Reset the system to re-initialize all hardware. Tested operation with mask and wafer- OK. From hector at snf.stanford.edu Thu Sep 29 02:09:35 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Thu, 29 Sep 2011 02:09:35 -0700 Subject: Problem karlsuss SNF 2011-09-29 02:09:35: exposure nonuniformity Message-ID: One part of the wafer edge is not getting enough energy. I exposed 4 wafers and they progressively got a bit worse. Perhaps its time for a lamp change... From vilanova at snf.stanford.edu Thu Sep 29 09:14:33 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Sep 2011 09:14:33 -0700 Subject: Problem karlsuss SNF 2011-09-29 02:09:35: exposure nonuniformity Message-ID: Lamp Change Completed and Calibrated Results Average Intensity = 15.0Mw/Cm2 Uniformity = 1.63% From vilanova at snf.stanford.edu Thu Sep 29 09:14:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Sep 2011 09:14:55 -0700 Subject: Comment karlsuss SNF 2011-09-29 09:14:54: Lamp Change Completed and Calibrated Results Message-ID: Lamp Change Completed and Calibrated Results Average Intensity = 15.0Mw/Cm2 Uniformity = 1.63%