Problem karlsuss SNF 2011-09-29 02:09:35: exposure nonuniformity

hector at snf.stanford.edu hector at snf.stanford.edu
Thu Sep 29 02:09:35 PDT 2011


One part of the wafer edge is not getting enough energy.  I exposed 4 wafers and they progressively got a bit worse.
Perhaps its time for a lamp change...




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