Problem karlsuss SNF 2011-09-29 02:09:35: exposure nonuniformity

hector at hector at
Thu Sep 29 02:09:35 PDT 2011

One part of the wafer edge is not getting enough energy.  I exposed 4 wafers and they progressively got a bit worse.
Perhaps its time for a lamp change...

More information about the karlsuss-pcs mailing list