From vilanova at snf.stanford.edu  Tue Jul 10 08:45:51 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 10 Jul 2012 08:45:51 -0700
Subject: Comment karlsuss SNF 2012-07-10 08:45:50: Monthly Lamp change and calibration Completed. 
Message-ID: <mailman.1625.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Intensity Average = 15Mw/Cm2
Intensity = 1%



From npapte at snf.stanford.edu  Thu Jul 12 15:42:40 2012
From: npapte at snf.stanford.edu (npapte at snf.stanford.edu)
Date: Thu, 12 Jul 2012 15:42:40 -0700
Subject: Problem karlsuss SNF 2012-07-12 15:42:39: tape on chuck
Message-ID: <mailman.1626.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

one of the chucks has tape on it. Please take the tape off after using it. Other users should not have to clean up the tape before using the aligners.



From vilanova at snf.stanford.edu  Fri Jul 13 07:28:28 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 13 Jul 2012 07:28:28 -0700
Subject: Problem karlsuss SNF 2012-07-12 15:42:39: tape on chuck
Message-ID: <mailman.1627.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Cleaned Up Chuck  , Ok to use.  



From popomoo at snf.stanford.edu  Sat Jul 28 11:26:12 2012
From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu)
Date: Sat, 28 Jul 2012 11:26:12 -0700
Subject: Problem karlsuss SNF 2012-07-28 11:26:11: the left bulb for BSA doesn't work
Message-ID: <mailman.1628.1357938461.25750.karlsuss-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Jul 30 06:46:15 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 30 Jul 2012 06:46:15 -0700
Subject: Problem karlsuss SNF 2012-07-28 11:26:11: the left bulb for BSA doesn't work
Message-ID: <mailman.1629.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Replaced Both BSA LightBulbs, Tested, Bsa and All The rest
Of Operations Are Ok, Good to use. 



From xzhuan1 at snf.stanford.edu  Mon Jul 30 16:18:37 2012
From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu)
Date: Mon, 30 Jul 2012 16:18:37 -0700
Subject: Problem karlsuss SNF 2012-07-30 16:18:36: poor exposure uniformity across wafer
Message-ID: <mailman.1630.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

maybe lamp changes are due?



From vilanova at snf.stanford.edu  Tue Jul 31 07:54:15 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 31 Jul 2012 07:54:15 -0700
Subject: Problem karlsuss SNF 2012-07-30 16:18:36: poor exposure uniformity across wafer
Message-ID: <mailman.1631.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Lamp Calibration Completed, UNIFORMITY 2.1%
INTENSITY = 15MW/CM2