Problem karlsuss SNF 2012-07-30 16:18:36: poor exposure uniformity across wafer
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Mon Jul 30 16:18:37 PDT 2012
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Problem karlsuss SNF 2012-07-28 11:26:11: the left bulb for BSA doesn't work
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Problem karlsuss SNF 2012-07-30 16:18:36: poor exposure uniformity across wafer
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maybe lamp changes are due?
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Problem karlsuss SNF 2012-07-28 11:26:11: the left bulb for BSA doesn't work
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Problem karlsuss SNF 2012-07-30 16:18:36: poor exposure uniformity across wafer
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