From clee58 at snf.stanford.edu  Wed Jun  6 22:33:04 2012
From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu)
Date: Wed, 6 Jun 2012 22:33:04 -0700
Subject: Shutdown karlsuss SNF 2012-06-06 22:33:04: System is frozen
Message-ID: <mailman.1618.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

When I click the "Exposure" button, the system said "Please wait" and frozen. No buttons works. My mask and wafer is still loaded inside. Please save them for me. 



From gsosa at snf.stanford.edu  Thu Jun  7 10:52:04 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 7 Jun 2012 10:52:04 -0700
Subject: Shutdown karlsuss SNF 2012-06-06 22:33:04: System is frozen
Message-ID: <mailman.1619.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Reset the system. Removed users wafers and mask. Recentered stages. Checked and replaced the UV lamp. Calibrated intensity to 15.0Mw/cm2



From kyunglok at snf.stanford.edu  Tue Jun 12 00:34:24 2012
From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu)
Date: Tue, 12 Jun 2012 00:34:24 -0700
Subject: Shutdown karlsuss SNF 2012-06-12 00:34:23: Program stuck
Message-ID: <mailman.1620.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Enabled it. Then loaded the program which had been saved before. Then error came up. 
X, Y in range
Chuck and TH out of range and they cannot be in range.
Cannot handle it and shut it down.



From vilanova at snf.stanford.edu  Tue Jun 12 07:40:33 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 12 Jun 2012 07:40:33 -0700
Subject: Shutdown karlsuss SNF 2012-06-12 00:34:23: Program stuck
Message-ID: <mailman.1621.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

ReInitialized system , Loaded Mask and Exposed Wafers, All operations
Ok, Good to use. 
p.S. It Would Be Nice If User Dont leave the blank mask On the system after disable it Otherwise Somene Else Could Break it , put it
back in the Mask  Container After every use. 



From vilanova at snf.stanford.edu  Wed Jun 13 13:58:48 2012
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Jun 2012 13:58:48 -0700
Subject: Comment karlsuss SNF 2012-06-13 13:58:48: Replaced BSA Burned Uot Light Bulb
Message-ID: <mailman.1622.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Replaced BSA Burned Uot Light Bulb



From chienyuc at snf.stanford.edu  Mon Jun 18 13:05:20 2012
From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu)
Date: Mon, 18 Jun 2012 13:05:20 -0700
Subject: Problem karlsuss SNF 2012-06-18 13:05:19: power off
Message-ID: <mailman.1623.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Found system frozen in "please waiting" before use.



From gsosa at snf.stanford.edu  Mon Jun 18 15:16:46 2012
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 18 Jun 2012 15:16:46 -0700
Subject: Problem karlsuss SNF 2012-06-18 13:05:19: power off
Message-ID: <mailman.1624.1357938461.25750.karlsuss-pcs@snf.stanford.edu>

Reset system and re-initialized the hardware.