From vilanova at snf.stanford.edu Fri May 11 07:53:51 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2012 07:53:51 -0700 Subject: Shutdown karlsuss SNF 2012-05-11 07:53:50: Monthly Lamp Calibration In Progress..... Message-ID: From vilanova at snf.stanford.edu Fri May 11 08:47:27 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2012 08:47:27 -0700 Subject: Shutdown karlsuss SNF 2012-05-11 07:53:50: Monthly Lamp Calibration In Progress..... Message-ID: Monthly Lamp And Calibration Completed Average Intensity = 15Mw/Cm2 Uniformity = 2.93% From vilanova at snf.stanford.edu Fri May 11 08:47:44 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2012 08:47:44 -0700 Subject: Comment karlsuss SNF 2012-05-11 08:47:43: Monthly Lamp And Calibration Completed Message-ID: Monthly Lamp And Calibration Completed Average Intensity = 15Mw/Cm2 Uniformity = 2.93% From jasonlin at snf.stanford.edu Sun May 13 20:42:54 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 13 May 2012 20:42:54 -0700 Subject: Problem karlsuss SNF 2012-05-13 20:42:53: X, Y micrometers don't work Message-ID: x, y micrometers doesn't move the stage, seems like it is not connected and feels very loose when rotating the micrometers. You might still be able to use it for non-aligned exposures. From vilanova at snf.stanford.edu Mon May 14 07:28:40 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 May 2012 07:28:40 -0700 Subject: Problem karlsuss SNF 2012-05-13 20:42:53: X, Y micrometers don't work Message-ID: Both Micrometer were moved way out of HOme Position , therefore they couldnt make the sensor, I re initialiezed the system and tested a few times, MIcrometer working good, Ok to use. From dton at snf.stanford.edu Wed May 16 13:17:30 2012 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Wed, 16 May 2012 13:17:30 -0700 Subject: Comment karlsuss SNF 2012-05-16 13:17:30: Backside microscope motion. Message-ID: The backside microscope used to be able to move much farther than current before out of range. Used to be around +/- 40 in x -- now it's about 35... My masks were designed with key around 37 . From vilanova at snf.stanford.edu Wed May 16 13:54:44 2012 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 May 2012 13:54:44 -0700 Subject: Comment karlsuss SNF 2012-05-16 13:17:30: Backside microscope motion. Message-ID: Just checked both Left and right bottom Microscopes and both of them Go Up To +/- 43 , That is the limit For both of them , if they get moved beyond that the system will get an error and the MIcrometers Might not come back to center position, Tested and ready to use,.