From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem Clear karlsuss: Message-ID: adj vac seal air pressure. cycled dummy wafer, ok to use From jac at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: Apr 16, 2000 Subject: Shutdown karlsuss: karlsuss overcurrent error Message-ID: karlsuss will not run-overcurrent error. jac From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 17, 2000 Subject: Shutdown Clear karlsuss: Message-ID: initialized system, ready for use From emc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem karlsuss: karlsuss Message-ID: the CI2 is blinking, after the labwide water leak... From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 18, 2000 Subject: Problem Clear karlsuss: Message-ID: reignited and calibrated lamp. From lian at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: Apr 23, 2000 Subject: Problem karlsuss: Message-ID: overcurrent error, can't start From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 24, 2000 Subject: Problem Clear karlsuss: Message-ID: cleared overcurrent error, init sys. ok to use From lian at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: Apr 25, 2000 Subject: Problem karlsuss: Message-ID: When I used Backside Alignment, the right field couldn't switch to high magnification (but left side did). From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 1, 2000 Subject: Problem Clear karlsuss: no problem found Message-ID: no problem found From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 3, 2000 Subject: Problem karlsuss: backside magnification Message-ID: can not get high magnification on right backside objective From zhang at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: May 5, 2000 Subject: Comment karlsuss: Message-ID: karlsuss is free 1:30pm-3:30pm From emc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: May 9, 2000 Subject: Problem karlsuss: backside hi mag doesn't work on right Message-ID: for the right objective, the hi mag doesn't work... this means very poor litho (10-20um error) only for backside alignment.... From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 11, 2000 Subject: Problem Clear karlsuss: Message-ID: right side bsa hi/low mechanism was jammed. cleaned & tightened bsa magnification ass'y. tested ok. also, repleced and calibrated lamp. ready for use. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 11, 2000 Subject: Problem Clear karlsuss: Message-ID: see previous message. From zhang at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: May 12, 2000 Subject: Shutdown karlsuss: Message-ID: After I enabled Karlsuss, screen says Ready for Start Press "LOAD" button. But after I pressed "LOAD", screen says OVERCURRENT cannot continue. Bob Wheeler suggested that I try rebooting it, and if still not working, write as a shutdown. So I tried turning power switch off and on twice but it gave me the same error mmessage. Previous user reported that Coral system went down for a while just when he was done with using Karlsuss, So it got automatically disabled itself. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown Clear karlsuss: Message-ID: problem must have been taken care of over the weekend. i found no over current errors, system initialized ok. the MA6 is ready, willing, and somewhat able. From franklin at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: May 17, 2000 Subject: Shutdown karlsuss: Overcurrent message, machine locked Message-ID: Karl Suss displayed overcurrent message after unloading a wafer. Turned machine off(green key) and on but it is still locked up. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 18, 2000 Subject: Shutdown Clear karlsuss: Message-ID: right bsa jammed again. fix is temporary. From jac at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: May 20, 2000 Subject: Problem karlsuss: won't do anything Message-ID: From lindaw at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 21, 2000 Subject: Problem karlsuss: rt bsa optics are off their track again Message-ID: From sanli at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: May 21, 2000 Subject: Problem karlsuss: karlsuss is not working Message-ID: From mourlas at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mourlas at snf.stanford.edu (mourlas at snf.stanford.edu) Date: May 21, 2000 Subject: Problem karlsuss: Message-ID: The machine was left as if it had been powered off and was waiting for the "load" button to be pressed. After pressing the load button the machine warns the user that it can not move all motor exes and returns to its original state..."Ready for Start, Press the LOAD Button." I was unable to use the machine however I'm not shutting it down as one of the early morning users may kow what the problem is. From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear karlsuss: fixed Message-ID: problem fixed by Mike From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear karlsuss: fixed Message-ID: problem fixed by Mike From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear karlsuss: fixed Message-ID: problem fixed by Mike From prisbe at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: prisbe at snf.stanford.edu (prisbe at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear karlsuss: fixed Message-ID: Problem fixed by Mike From sbiaa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sbiaa at snf.stanford.edu (sbiaa at snf.stanford.edu) Date: May 26, 2000 Subject: Shutdown karlsuss: Power off Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 30, 2000 Subject: Shutdown Clear karlsuss: Message-ID: Machine found off , found loose switch ,fixed swtich ,reinitialized machine ready to use. From ericp at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Jun 10, 2000 Subject: Problem karlsuss: Problem starting up Message-ID: Machine goes through startup routine, and quits with error "overcurrent". Head moves to limit switch and stops. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem Clear karlsuss: Message-ID: reignited lamp, initialized system, ready for use From aoshima at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: aoshima at snf.stanford.edu (aoshima at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem karlsuss: Karlsuss Problem Message-ID: The lamp for exposure was burn out. From mahnaz at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem Clear karlsuss: Message-ID: changed lamp From sminne at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Jun 13, 2000 Subject: Problem karlsuss: won't pass "press load to start" Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 13, 2000 Subject: Problem Clear karlsuss: Message-ID: tightened bsa base. system initialized ok. From lindaw at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 17, 2000 Subject: Problem karlsuss: rt bsa no hi mag Message-ID: the right BSA microscope has no high magnification. The left microscope toggles fine between high and low mag. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 19, 2000 Subject: Problem Clear karlsuss: Message-ID: hi/lo mag ok now. ready for use. From storment at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Jun 20, 2000 Subject: Problem karlsuss: Bad Contact To Mask Message-ID: The right side of the wafer chuck doesn't com up all of the way to the mask. This is called a wedge error. The left side of the wafer exposed ok the right side is completely out of focus. Mike will need to fix this Immediately From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 22, 2000 Subject: Problem Clear karlsuss: Message-ID: cycled two test wafers, resolution is good on both. npf From caudillo at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jun 28, 2000 Subject: Problem karlsuss: Backside/bottom left objective lamp is out Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 28, 2000 Subject: Problem Clear karlsuss: Message-ID: Projector lamp changed ready to use From pzwahlen at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Jun 28, 2000 Subject: Problem karlsuss: Initialisation problem with the motors Message-ID: The aligner keeps on asking to push the load button. It then goes through an initialisation step. At the end a message says "could not move all the motor axes". From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 29, 2000 Subject: Problem Clear karlsuss: Message-ID: reseated z axis motor connector. From caudillo at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jul 5, 2000 Subject: Problem karlsuss: Misalignments occur using BSA/Grab Imag. Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 6, 2000 Subject: Problem Clear karlsuss: Message-ID: npf From lindaw at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem karlsuss: bsa overcurrent when grab image Message-ID: I got two wafers exposed with the backside align, and then when I went to grab the image for my third wafer, I got an overcurrent and the machine drops my mask and restarts when I press the enter button as prompted by the screen. HELP!!!! From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 13, 2000 Subject: Problem Clear karlsuss: Message-ID: MA/6 is available for use in both tsa, & bsa modes. From sminne at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Jul 13, 2000 Subject: Problem karlsuss: KS will drop the mask and error after grab image in BSA Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 18, 2000 Subject: Problem Clear karlsuss: Message-ID: field service came in and remounted right bsa, and tested all functions. ready for use From emc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Jul 19, 2000 Subject: Comment karlsuss: alarm sounds during exposure Message-ID: intensity down to ~28, ie <30 so alarming? (CI2) From erniec at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: erniec at snf.stanford.edu (erniec at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem karlsuss: overcurrent on the karlsuss Message-ID: i was using the karlsuss today going through the normal backside align process. the previous user was using the smaller mask holder so i changed the maskholder to the standard one. i inserted my mask and started looking for my targets. as i was moving the BSA microscopes around the machine locked up and it said overcurrent on the little message screen. i could not start up the machine again. ernie chuang From rjchen at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: rjchen at snf.stanford.edu (rjchen at snf.stanford.edu) Date: Jul 26, 2000 Subject: Problem karlsuss: karl suss Message-ID: blank display screen From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem Clear karlsuss: Message-ID: over current error cleared. system ready for use. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 27, 2000 Subject: Problem Clear karlsuss: Message-ID: over current error cleared. system ready for use. From lindaw at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem karlsuss: align gap is bigger than the display setting Message-ID: In hard contact, the right side of the wafers seems to always befurther from the mask than the left, judging by the depth of focus. ALSO, after checking alignment, the gap resets to something much larger than the 30 um display. When I decrease the separation to 0, in contact, the wafers are still separated by a large gap. There doesn't appear to be anything on the wafers or mask that would cause this huge separation. When I check the alingment again, then the wafers move into focus with the mask. Itseems as if the WEC is confused or has lost its place or something. HELP? From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 7, 2000 Subject: Problem Clear karlsuss: Message-ID: increased wec pressure. ready for use From lindaw at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Aug 11, 2000 Subject: Problem karlsuss: lamp degrading CI2 alarms Message-ID: The power supply alarms when exposing on CI2 From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 11, 2000 Subject: Problem Clear karlsuss: Message-ID: From emc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Aug 11, 2000 Subject: Problem karlsuss: overcurrent- not able to run Message-ID: machine can't complete initialization From flannery at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Aug 15, 2000 Subject: Shutdown karlsuss: Karlsuss Message-ID: Chuck out of range error. I power cycled it and that didn't help. Error happened when I was moving BSA left objective all the way to the left. I left it off because of the beeping. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 15, 2000 Subject: Shutdown Clear karlsuss: Message-ID: System Reinialization done chuck in center position , Still waiting for meter to arrive , to calibrate lamp From ssinha at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Aug 18, 2000 Subject: Comment karlsuss: Message-ID: The angular alignment on the Karlsuss seemed stuck, when I logged on earlier. I have not been able to align it. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 18, 2000 Subject: Problem Clear karlsuss: Message-ID: chuck back to normal position ok to use From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 18, 2000 Subject: Problem karlsuss: Message-ID: waiting for karlsuss lamp Intensity meter. From rjchen at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: rjchen at snf.stanford.edu (rjchen at snf.stanford.edu) Date: Aug 20, 2000 Subject: Problem karlsuss: Message-ID: House vacuum is down. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 22, 2000 Subject: Problem Clear karlsuss: Message-ID: init sys. ok now From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 22, 2000 Subject: Problem Clear karlsuss: Message-ID: init sys ok now From franklin at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Aug 23, 2000 Subject: Problem karlsuss: alarm during exposure Message-ID: When I exposed my wafers the an alarm would sound the whole time the wafer was being exposed. The meter displayed what looked like the correct light intensity and after developing my wafers were exposed roughly as much as I would expect for the given exposure time. Second thing When aligning at high magnification there seems to be a problem with the focusing knobs or motors. The image in the display shifts by ~1/2 inch when adjusting the focus. The same is true when utilizing the top/bottom focus toggle. This image shift makes the grab image feature useless and makes alignment quite difficult. Hopefully there is some simple fix like tightening the optic mounts to eliminate the slack in the focusing thanks and good luck nate From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 23, 2000 Subject: Problem Clear karlsuss: Message-ID: chuck back in center position ready to use From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 25, 2000 Subject: Problem karlsuss: Message-ID: Reset mechanics failed From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 25, 2000 Subject: Shutdown karlsuss: Message-ID: mechanical problem From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 28, 2000 Subject: Shutdown Clear karlsuss: Message-ID: reseated z axis motor ribbon cable. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 28, 2000 Subject: Problem Clear karlsuss: Message-ID: problem cleared From mtrivedi at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mtrivedi at snf.stanford.edu (mtrivedi at snf.stanford.edu) Date: Aug 28, 2000 Subject: Problem karlsuss: vacuum loss on wafer; unable to focus Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 28, 2000 Subject: Shutdown karlsuss: Message-ID: tsa microscope movement is unreliable. From sigari at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown karlsuss: Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown Clear karlsuss: Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown Clear karlsuss: Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown karlsuss: Message-ID: back to shut down mode. problems not resolved From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 29, 2000 Subject: Shutdown Clear karlsuss: Message-ID: system is back to normal but I would like to remind everyone to not power cycle this aligner. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem Clear karlsuss: Message-ID: adj grab z position. From leary at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: leary at snf.stanford.edu (leary at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem karlsuss: lamp alarm during exposure (CI2) Message-ID: From jac at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: Aug 30, 2000 Subject: Problem karlsuss: overcurrent during bsa Message-ID: when trying to "grab image" during bsa, the bsa eyes seem to move over a few (~10) microns, then the machine gives an overcurrent error. happened 3 times in a row. jac From flannery at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Aug 30, 2000 Subject: Problem karlsuss: COnfirm Overcurrent during BSA Message-ID: Happened to me last night 8/29 but couldn't write it up because Sunray went down. Dropped my mask. From emc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Aug 30, 2000 Subject: Problem karlsuss: LandR fine focus bad, lamp low Message-ID: lamp is low (28 instead of 30) and more importantly L fine focus in nonfunctional, R fine focus jumps a lot - this makes alignment near impossible From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear karlsuss: Message-ID: lamp changed , ready to use From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear karlsuss: Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear karlsuss: Message-ID: lamp changed ok to use From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem Clear karlsuss: Message-ID: lamp changed ok to use From jac at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem karlsuss: overcurrent during bsa 'grab image' Message-ID: same as yesterday: overcurrent when trying to 'grab image' for backside align. machine must be rest, drops mask. repeated twice. jac From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 1, 2000 Subject: Problem Clear karlsuss: Message-ID: machine reinitilized, npf From caudillo at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Sep 1, 2000 Subject: Problem karlsuss: Grabbed image and it went into overcurrent. Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 1, 2000 Subject: Comment karlsuss: Message-ID: do not grab image oryou will loose vacuum, use it only for top side aligment ,bad board problem From mtrivedi at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mtrivedi at snf.stanford.edu (mtrivedi at snf.stanford.edu) Date: Sep 10, 2000 Subject: Problem karlsuss: front panel turned-off on its own. Message-ID: From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 11, 2000 Subject: Problem Clear karlsuss: Message-ID: no problem found. From mahnaz at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 11, 2000 Subject: Comment karlsuss: pm Message-ID: The field service eng. is here and needs to do the annual pm. All the reservation are canceled till 4 pm. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 11, 2000 Subject: Shutdown karlsuss: karl suss shut down Message-ID: wec head needs to be remachined. system should be operational by Friday. From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown Clear karlsuss: MA6 ready for use Message-ID: all repairs completed, annual pm completed. system is ready for use. From sulchek at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: sulchek at snf.stanford.edu (sulchek at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown karlsuss: Message-ID: While choosing hard contact program, the parameter was set to 30000um gap. While trying to edit parameter, karl suss attempted to run. This gave me an error "overcurrent", which sent me to an endless loop of "machine start" and "overcurrent" error, with no way of exiting. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown Clear karlsuss: Message-ID: sys rebooted npf From storment at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown karlsuss: loss of wafer vac error Message-ID: loss of wafer vac error cannot load wafers From martinez at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 28, 2000 Subject: Shutdown Clear karlsuss: karl suss clear Message-ID: cleaned contamination from chuck, set up grab z, cycled wafers, tested ok. From ssinha at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: ssinha at snf.stanford.edu (ssinha at snf.stanford.edu) Date: Oct 6, 2000 Subject: Comment karlsuss: Message-ID: After loading wafer or sample on slide and then pushing into aligner, we get a message " loss of wafer vacuum ". From storment at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Oct 6, 2000 Subject: Problem karlsuss: WEC problems Message-ID: Unable to perform WEC. Wafer is not brought up into contact with mask. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 9, 2000 Subject: Problem Clear karlsuss: Message-ID: system rebooted npf From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 9, 2000 Subject: Shutdown karlsuss: Message-ID: machine found turned off after lunch on 10/09/00 Down for Maintenance From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 10, 2000 Subject: Shutdown Clear karlsuss: Message-ID: From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 10, 2000 Subject: Shutdown karlsuss: Message-ID: Karlsuss tech has been called From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-08-07 09:27:27: Scheduled lamp change 8/7 Message-ID: <4132465.50.1344356849018.JavaMail.coral@shine> Replaced the UV lamp. Calibrated lamp power supply. Uniformity: 1.0%, Average: 15.0 Mw/cm2 From jackson at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-08-11 17:50:36: backside alignment is out on the left side Message-ID: <13318502.150.1344732637580.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-08-11 17:50:36: backside alignment is out on the left side Message-ID: <24237713.7.1344868611844.JavaMail.coral@shine> Back Side Aligment Lamp are Both ON and Working Fine. From mahnaz at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-08-17 16:03:15: restarted the system Message-ID: <14678111.156.1345244596462.JavaMail.coral@shine> From tkodama at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-08-31 02:21:39: mask vacuum Message-ID: <23077774.144.1346404900427.JavaMail.coral@shine> Mask vacuum might be problem, and I could not fix it on the holder. From tkodama at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-08-31 03:29:55: about mask vacuum Message-ID: <13881259.145.1346408995675.JavaMail.coral@shine> It was due to my mistake, and it is working well. Sorry for bothering you. From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-08-31 02:21:39: mask vacuum Message-ID: <29573930.0.1346423799516.JavaMail.coral@shine> From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-08-31 03:29:55: about mask vacuum Message-ID: <26120160.1.1346423803553.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-09-05 09:13:39: Monthly Lamp and CALIBRATION COMPLETED Message-ID: <346967.33.1346861620266.JavaMail.coral@shine> Monthly lamp and calibration completed Intensity = 15.6mw/Cm2 Uniformity = 1.5% From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-10-08 09:26:58: Monthly lamp Completed Message-ID: <24805139.12.1349713619778.JavaMail.coral@shine> Monthly Lamp And Calibration Completed. Average Intensity = 15Mw/Cm2 Uniformity = 1% From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-10-26 09:35:16: Lamp Re - Calibration Message-ID: <838481.116.1351269317838.JavaMail.coral@shine> During Daily Check up Routine Heard a noise while Exposing wafers, Recalibrated lamp No , Mo beeping NOise after Exposure, Ok to use. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-11-05 11:19:27: Lamp change and calibration Completed Message-ID: <31148936.19.1352143168123.JavaMail.coral@shine> Lamp change and Calibration Completed ; average Intensity = 15Mw/Cm2 Uniformity = 1% From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-11-09 12:48:17: Badger Install 11/9 Message-ID: <29842687.17.1352494098658.JavaMail.coral@shine> Installed and activated badger interlock box in place of Coral box. Interlock tested OK. The "ON" display was replaced with a 2 color LED. When the red light is on, the tool is disabled. When the green light is on, the tool is enabled. From suyog at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-16 17:42:18: Keys not responding Message-ID: <22498125.135.1353116538784.JavaMail.coral@shine> From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-16 17:42:18: Keys not responding Message-ID: <2858133.145.1353214897282.JavaMail.coral@shine> Recentered the stages and did a full reset of hardware. From apal at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-17 23:03:31: No Microscope light Message-ID: <10165778.147.1353222212014.JavaMail.coral@shine> From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-17 23:03:31: No Microscope light Message-ID: <24390742.4.1353342538767.JavaMail.coral@shine> Replaced Burned Out Top MIcroscope Light and tested, ok , Good to use. From jasonlin at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-20 16:34:51: Wafer tray doesn't stay Message-ID: <23755929.3.1353458091785.JavaMail.coral@shine> The wafer tray doesn't stay in place when you push it in From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-11-20 16:34:51: Wafer tray doesn't stay Message-ID: <942815.11.1353512030403.JavaMail.coral@shine> wafer tray cable was preventing the tray from coming in and out easily, adjusted the cable and moved it to a different location , everything good , system back to normal, Ok to use. From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Comment karlsuss SNF 2012-11-28 08:51:12: Monthly lamp changed and calibrated Message-ID: <6464516.37.1354121473961.JavaMail.coral@shine> Lamp Change and calibration Results: Intensity = 15Mw/Cm2 Uniformity 1% From kgc at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: kgc at snf.stanford.edu (kgc at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Shutdown karlsuss SNF 2012-12-04 18:48:25: overcurrent Message-ID: <15750173.34.1354675706841.JavaMail.coral@shine> overcurrent (z-axis) error. Machine keeps on restarting and you cannot do anything on it except keep pressing "load" and having it keep restarting I had to manually disconnect the mask vacuum to get my mask back (i put it back, but it should probably be checked before someone else puts their mask in there) From vilanova at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Shutdown karlsuss SNF 2012-12-04 18:48:25: overcurrent Message-ID: <5264648.44.1354719790986.JavaMail.coral@shine> When Users Move The Z Axis off Limits the Tool Wont make it back to the Sensor, This usually happens While Trying TO aligned Pieces. Tested Ok ready to use. From junam at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-12-18 01:44:54: Microscope won't go up Message-ID: <20044252.71.1355823895603.JavaMail.coral@shine> Had to stop processing because the machhine wouldn't respond. Didn't shut down the machine just in case someone can fix it. Sorrry for the inconvenience. Wooshik From gsosa at snf.stanford.edu Fri Jan 11 13:07:28 2013 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:07:28 -0000 Subject: Problem karlsuss SNF 2012-12-18 01:44:54: Microscope won't go up Message-ID: <24140917.81.1355852597622.JavaMail.coral@shine> Re-installed the locating pin for the top microscope. Adjusted spring tension for microscope theta rotation. Checked and adjusted WEC home sensor position. Tested operation- OK.