Problem karlsuss: Bad Contact To Mask

storment at snf.stanford.edu storment at snf.stanford.edu
Fri Jan 11 13:07:28 PST 2013


The right side of the wafer chuck doesn't com up all of the way to the mask. This is called a wedge error. The left side of the wafer exposed ok the right side is completely out of focus. 
Mike will need to fix this Immediately




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