Problem karlsuss: bsa overcurrent when grab image

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Jan 11 13:07:28 PST 2013


I got two wafers exposed with the backside align, and then when I went to grab the image for my third wafer, I got an overcurrent and the machine drops my mask and restarts when I press the enter button as prompted by the screen.  HELP!!!!




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