Problem karlsuss: overcurrent on the karlsuss

erniec at snf.stanford.edu erniec at snf.stanford.edu
Fri Jan 11 13:07:28 PST 2013


i was using the karlsuss today going through the normal backside align process.  the previous user was using the smaller mask holder so i changed the maskholder to the standard one.  i inserted my mask and started looking for my targets.  as i was moving the BSA microscopes around the machine locked up and it said overcurrent on the little message screen.  i could not start up the machine again.
ernie chuang




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